Piezoelectric-on-silicon lateral bulk acoustic wave micromechanical resonators

Journal of Microelectromechanical Systems

Volumn 17, Issue 2, 2008, Pages 512-520

  Ho, Gavin K ^a   Abdolvand, Reza ^b   Sivapurapu, Abhishek ^c   Humad, Shweta ^d   Ayazi, Farrokh ^e  

^a ANALOG DEVICES INC   (United States)

^b Oklahoma State University   (United States)

^c APPLIED MATERIALS INC   (United States)

^d Goodrich Sensor Systems   (United States)

^e GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Bulk acoustic wave resonator; Microelectromechanical resonator; Zinc oxide (ZnO)

Indexed keywords

ABSORBED POWER; ACOUSTIC MODES; BULK ACOUSTIC WAVE RESONATOR; BULK ACOUSTIC WAVES; ELECTRO-MECHANICAL MODELS; FREQUENCY-SELECTIVE COMPONENTS; LINEAR RESONATORS; MICRO MECHANICALS; MICRO-MECHANICAL RESONATORS; MICROELECTROMECHANICAL RESONATOR; OPTIMIZING PERFORMANCE; OUTPUT CURRENTS; SILICON-ON-INSULATOR SUBSTRATES; SINGLE CRYSTAL SILICONS; ZINC OXIDE FILMS;

ACOUSTIC IMPEDANCE; ACOUSTIC RESONATORS; ACOUSTIC WAVES; ACOUSTICS; LATTICE VIBRATIONS; OPTICAL RESONATORS; OXIDE FILMS; SEMICONDUCTING ZINC COMPOUNDS; ZINC; ZINC OXIDE;

RESONATORS;

EID: 57649133078     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.906758     Document Type: Article

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