An analytical study on interfacial dissipation in piezoelectric rectangular block resonators with in-plane longitudinal-mode vibrations

Sensors and Actuators, A: Physical

Volumn 163, Issue 1, 2010, Pages 401-409

  Hao, Zhili ^a   Liao, Boxiong ^b  

^a Old Dominion University   (United States)

^b Precision Sensor and System   (United States)

Author keywords

Interfacial dissipation; Piezoelectric; Resonators; Solid solid interfaces; Vibrations

Indexed keywords

ANALYTICAL MODEL; DESIGN PARAMETERS; EXPERIMENTAL DATA; FILM-SUBSTRATE SYSTEMS; IN-PLANE; INTERFACE STRAIN; INTERFACE STRESS; INTERFACIAL DISSIPATION; INTERFACIAL SLIP; PHYSICAL MECHANISM; PIEZOELECTRIC; RECTANGULAR BLOCK; SOLID-SOLID INTERFACES; STRESS JUMPS; VIBRATIONS;

COMPUTER SIMULATION; CONTINUUM MECHANICS; DIFFUSION IN SOLIDS; ELASTICITY; MATERIALS SCIENCE; MATHEMATICAL MODELS; MODELS; PIEZOELECTRICITY; RESONATORS; STRESSES;

VIBRATION ANALYSIS;

EID: 77957673853     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.08.023     Document Type: Article

References (32)

1. H. Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, J. Pulskamp, D. Judy, R. Kaul, M. Dubey, Influence of silicon on quality factor, motional impedance and tuning range of PZT-transduced resonators, 2008 Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2008), Hilton Head Island, South Carolina, June 1-5, 2008, pp. 360-363.
2. G.K. Ho, R. Abdolvand, A. Sivapurapu, S. Humad, and F. Ayazi Piezoelectric-on-silicon lateral bulk acoustic wave micromechanical resonators IEEE Journal of Microelectromechanical Systems 17 2 2008 512 520
3. S. Humad, R. Abdolvand, G.K. Ho, G. Piazza, and F. Ayazi High frequency micromechanical piezo-on-silicon block resonators Tech. Dig. IEEE Int. Electron Devices Meeting (IEDM 2003) Washington, DC, December 2003 957 960
4. 0.7As longitudinal mode block resonators Journal of Microelectromechanical Systems 15 2006 466 470
5. G. Piazza, P.J. Stephanou, and A.P. Pisano Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators Journal of Microelectromechanical Systems 15 6 2006 1406 1418
6. R.H. Olsson III, J.G. Fleming, K.E. Wojciechowski, M.S. Baker, and M.R. Tuck Post-CMOS compatible aluminum nitride MEMS filters and resonant sensors IEEE Frequency Control Symposium, May 29-June 1 2007 412 419
7. Z. Hao, A. Erbil, and F. Ayazi An analytical model for support loss in micromachined block resonators with in-plane flexural vibrations Sensors and Actuators A 109 2003 156 164
8. Z. Hao, Y. Xu, and S.K. Durgam A Thermal-energy method for calculating thermoelastic damping in micromechanical resonators Journal of Sound and Vibration 322 2009 870 882
9. K.Y. Yasumura, T.D. Stowe, E.M. Chow, T. Pfafman, T.W. Kenny, B.C. Stipe, and D. Rugar Quality factors in micron- and submicron-thick cantilevers Journal of Microelectromechanical Systems 9 1 2000 117 125
10. Zhili Hao, and Yang Xu Vibration displacement on substrate due to the time-harmonic stress sources from a micromechanical resonator Journal of Sound and Vibration 322 2009 196 215
11. T. Mattila, J. Kiihamäki, T. Lamminmäki, O. Jaakkola, P. Rantakari, A. Oja, H. Seppä, H. Kattelus, and I. Tittonen A 12 MHz micromechanical bulk acoustic mode oscillator Sensors and Actuators A 101 2002 1 9
12. S. Pourkamali, G.K. Ho, and F. Ayazi Vertical capacitive SiBARs Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS'05) Miami, FL, January 2005 211 214
13. W. Pan, and F. Ayazi Thin-film piezoelectric-on-substrate resonators with Q enhancement and tcf reduction IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) Hong Kong, January 2010 104 107
14. M.E. Gurtin, and P.W. Voorhees The continuum mechanics of coherent two-phase elastic solids with mass transport Proceedings of the Royal Society of London A 440 1993 323 343
15. M.E. Gurtin, and P.W. Voorhees The thermodynamics of evolving interfaces far from equilibrium Acta Materials 44 1 1996 235 247
16. G. Paasch, and B.M. Grafov Thermodynamics of interface elasticity Russian Journal of Electrochemistry 45 1 2009 73 80
17. L. Angheluta, E. Jettestuent, J. Mathiesen, F. Renard, and B. Jamtveit Stress-driven phase transformation and the roughening of solid-solid interfaces Physical Review Letters 100 9 2008 id. 096105
18. R.C. Cammarata, K. Sieradzki, and F. Spaepen Simple model for interface stresses with application to misfit dislocation generation in epitaxial thin film Journal of Applied Physics 87 2 2000 1227 1234
19. R.C. Cammarata, and K. Sieradzki Surface and interface stresses Annual Review Materials Science 24 1994 215 234
20. R.C. Cammarata Surface and interface stress effects in thin films Progress in Surface Science 46 1 1994 1 38
21. W.D. Nix, and H. Gao An atomistic interpretation of interface stress Scripta Materialia 39 12 1998 1653 1661
22. I.N. Mastorakos, H.M. Zbib, and D.F. Bahr Deformation mechanisms and strength in nanoscale multilayer metallic composites with coherent and incoherent interfaces Applied Physics Letters 94 2009 173114
23. J. Weissmuller, and J.W. Cahn Mean stresses in microstructures due to interface stresses: a generalization of capillary equation for solids Acta Materials 45 5 1997 1899 1906
24. F. Spaepen Interfaces and stresses in thin films Acta Materials 48 2000 31 40
25. D.D. Fong, Stresses in Cu thin films and Ag/Ni multilayers, Ph.D. dissertation, Harvard University, 2001.
26. S. Izumi, S. Hara, T. Kumagai, and S. Sakai A method for calculating surface stress and surface elastic constants by molecular dynamics: application to the surface of crystal and amorphous silicon Thin Solid Films 467 2004 253 260
27. H.L. Duan, J. Wang, Z.P. Huang, and B.L. Karihaloo Size-dependent effective elastic constants of solids containing nano-inhomogeneities with interface stress Journal of the Mechanics and Physics of Solids 53 2005 1574 1596
28. M. Christophersen, B. Shapiro, and E. Smela Characterization and modeling of PPy bilayer microactuator. Part 1. Curvature Sensors and Actuators B 115 2006 596 609
29. B. Shapiro Bending actuators with maximum curvature and force and zero interfacial stress Journal of Intelligent Material Systems and Structures 18 2 2007 181 186
30. S. Saravanana, E.G. Keimb, G.J.M. Krijnena, and M. Elwenspoek Growth and surface characterization of piezoelectric AlN thin films on silicon (1 0 0) and (1 1 0) substrates Microscopy of Semiconducting Materials. Springer Proceedings in Physics, vol. 107 2005 Springer
31. K. Deng, P. Kumar, L. Li, and D.L. DeVoe Piezoelectric disk resonators based on epitaxial AlGaAs films Journal of Microelectromechanical Systems 16 1 2007 155 162
32. W.F. Smith, and J. Hashemi Foundation of Materials Science and Engineering 4th ed. 2005 McGraw Hill