SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 30, Issue 1, 2012, Pages

Thin-film electronics by atomic layer deposition

(2) Levy, David H a Nelson, Shelby F a

a EASTMAN KODAK COMPANY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARRIER LAYERS; CONFORMAL FILMS; DEPOSITION TECHNOLOGY; HIGH RESISTIVITY; OFF CURRENT; SWITCHING CHARACTERISTICS; THIN FILM ELECTRONICS; ZNO;

ATOMIC LAYER DEPOSITION; SEMICONDUCTING ORGANIC COMPOUNDS; THIN FILM TRANSISTORS; ZINC OXIDE;

TRANSISTORS;

EID: 84855571978 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3670748 Document Type: Article

Times cited : (30)

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