Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering

Applied Physics Letters

Volumn 82, Issue 7, 2003, Pages 1117-1119

  Carcia, P F ^a   McLean, R S ^a   Reilly, M H ^a   Nunes Jr , G ^a  

^a DUPONT COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; FIELD EFFECT TRANSISTORS; MAGNETRON SPUTTERING; X RAY DIFFRACTION; ZINC COMPOUNDS;

OPTICAL TRANSPARENCY;

THIN FILM TRANSISTORS;

EID: 0037450269     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1553997     Document Type: Article

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