A piezoelectric-driven three-dimensional MEMS VOA using attenuation mechanism with combination of rotational and translational effects

Journal of Microelectromechanical Systems

Volumn 19, Issue 6, 2010, Pages 1370-1379

  Koh, Kah How ^a   Lee, Chengkuo ^a   Kobayashi, Takeshi ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Microelectromechanical systems (MEMS); mirror; optical microelectromechanical systems; piezoelectric actuator; PZT; variable optical attenuator

Indexed keywords

ATTENUATION RANGE; DUAL-CORE FIBERS; ELECTRODE MATERIAL; GOLD-COATED; LIGHT ATTENUATION; MEMS VOA; MICROELECTROMECHANICAL SYSTEMS; MICROMACHINED; OPTICAL MICROELECTROMECHANICAL SYSTEMS; PB(ZR , TI)O; PZT; RELEASE PROCESS; SI DEVICES; SI MIRROR; SILICON MIRRORS; SOI SUBSTRATES; TORSIONAL MODES; VARIABLE OPTICAL ATTENUATORS;

CANTILEVER BEAMS; ELECTRIC ATTENUATORS; ELECTROMAGNETIC WAVE ATTENUATION; GOLD COATINGS; LEAD; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MIRRORS; NANOCANTILEVERS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; THREE DIMENSIONAL; ZIRCONIUM;

COMPOSITE MICROMECHANICS;

EID: 78649664993     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2076785     Document Type: Article

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