SCOPUS 정보 검색 플랫폼

Sensors and Actuators, A: Physical

Volumn 96, Issue 2-3, 2002, Pages 223-230

Design and fabrication of scanning mirror for laser display

(6) Lee, Jin Ho a Ko, Young Chul a Kong, Do Hyun a Kim, Jong Min a Lee, Ki Bang b Jeon, Duk Young c

a Samsung Advanced Institute of Technology (SAIT) (South Korea)

b UNIVERSITY OF CALIFORNIA (United States)

c Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

Author keywords

Flip chip bonding; Inductively coupled plasma reactive ion etching (ICPRIE); Laser display; Scanning mirror; Vertical comb

Indexed keywords

ELECTROSTATIC DEVICES; FLIP CHIP DEVICES; INDUCTIVELY COUPLED PLASMA; INTEGRATED CIRCUIT MANUFACTURE; LASER BEAMS; MICROELECTROMECHANICAL DEVICES; MIRRORS; REACTIVE ION ETCHING;

GALVANOMETRIC VERTICAL SCANNER; INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCHING; LASER DISPLAY; SILICON SCANNING MIRROR; VERTICAL COMB;

SILICON SENSORS;

EID: 0037186181 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/S0924-4247(01)00774-9 Document Type: Article

Times cited : (45)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.