The evolution of MEMS displays

IEEE Transactions on Industrial Electronics

Volumn 56, Issue 4, 2009, Pages 1057-1065

  Liao, Chun Da ^a   Tsai, Jui Che ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Grating light valve (GLV); Microelectromechanical systems (MEMS) display; Retinal scanning display (RSD); Scanning mirror

Indexed keywords

2-D ARRAYS; BI STABLES; DIGITAL MICRO MIRROR DEVICES; GRATING LIGHT VALVE (GLV); HEAD-UP; HIGH SCAN FREQUENCIES; LARGE SCAN ANGLES; LASER-SCANNING; MEMS MIRRORS; MEMS TECHNOLOGIES; MICRO-OPTO ELECTRO-MECHANICAL SYSTEMS; MICROELECTROMECHANICAL SYSTEMS (MEMS) DISPLAY; MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES; OPTICAL DIFFRACTIONS; PROJECTION DISPLAYS; RETINAL SCANNING DISPLAY (RSD); SCANNING DEVICES; SCANNING MIRROR; SPATIAL LIGHT MODULATORS; TEXAS INSTRUMENTS; THIN-FILM;

COMPOSITE MICROMECHANICS; LIGHT; LIGHT MODULATION; LIGHT MODULATORS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPHTHALMOLOGY; SEMICONDUCTOR SWITCHES; THREE DIMENSIONAL;

SCANNING;

EID: 65549153733     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2008.2005684     Document Type: Conference Paper

References (72)

1. J. A. Walker, "The future of MEMS in telecommunications networks," J. Micromech. Microeng., vol. 10, no. 3, pp. R1-R7, Sep. 2000.
2. A. Neukermans and R. Ramaswami, "MEMS technology for optical networking applications," IEEE Commun. Mag., vol. 39, no. 1, pp. 62-69, Jan. 2001.
3. B. Barber, C. R. Giles, V. Askyuk, R. Ruel, L. Stulz, and D. Bishop, "A fiber connectorized MEMS variable optical attenuator," IEEE Photon. Technol. Lett., vol. 10, no. 9, pp. 1262-1264, Sep. 1998.
4. C. Marxer, P. Griss, and N. F. Rooij, "A variable optical attenuator based on silicon micromechanics," IEEE Photon. Technol. Lett., vol. 11, no. 2, pp. 233-235, Feb. 1999.
5. J. A. Yeh, S. S. Jiang, and C. Lee, "MOEMS variable optical attenuators using rotary comb drive actuators," IEEE Photon. Technol. Lett., vol. 18, no. 10, pp. 1170-1172, May 15, 2006.
6. Y. Y. Kim, S. S. Yun, C. S. Park, J. H. Lee, Y. G. Lee, H. K. Lee, S. K. Yoon, and J. S. Kang, "Refractive variable optical attenuator fabricated by silicon deep reactive ion etching," IEEE Photon. Technol. Lett., vol. 16, no. 2, pp. 485-487, Feb. 2004.
7. C. Lee, "Arrayed variable optical attenuator using retro-reflective MEMS mirrors," IEEE Photon. Technol. Lett., vol. 17, no. 12, pp. 2640-2642, Dec. 2005.
8. 2 wavelength-selective switch," OSA Appl. Opt., vol. 46, no. 16, pp. 3227-3232, Jun. 2007.
9. J. C. Tsai and M. C. Wu, "A high port-count wavelength-selective switch using a large scan-angle, high fill-factor, two-axis MEMS scanner array," IEEE Photon. Technol. Lett., vol. 18, no. 13, pp. 1439-1441, Jul. 2006.
10. 2 wavelength-selective switch with two cross-scanning one-axis analog micromirror arrays in a 4-f optical system," J. Lightwave Technol. vol. 24, no. 2, pp. 897-903, Feb. 2006.
11. K. Takahashi, H. N. Kwon, M. Mita, K. Saruta, J. H. Lee, H. Fujita, and H. Toshiyoshi, "A 3D optical crossconnect using microlens scanner with topologically layer switching architecture," in Proc. IEEE/LEOS Int. Conf. Opt. MEMS Appl., 2006, pp. 185-186.
12. Y. Uenishi, J. Yamaguchi, T. Yamamoto, N. Takeuchi, A. Shimizu, E. Higurashi, and R. Sawada, "Free-space optical cross connect switch based on a 3D MEMS mirror array," in Proc. 15th Annu. Meeting IEEE Lasers Electro-Optics Soc., 2002, vol. 1, pp. 59-60.
13. O. Bouevitch, D. Touahri, J. P. Morgan, S. Panteleev, and C. Reimer, "Channel-power equalizer and dynamic gain equalizer based on the optical bench platform," in Proc. IEEE/LEOS Summer Topi All-Optical Netw.: Existing Emerging Architecture Appl./Dyn. Enablers Next-Generation Opt. Commun. Syst./Fast Opt. Process. Opt. Transmiss./ VCSEL Microcavity Lasers, 2002, pp. MD1-4-MD1-5.
14. M. Munechika, H. Uezawa, A. Oshima, S. Konishi, T. Sano, and M. Katayama, "Optical dynamic gain equalizer using parallel motion type of ECLIA," in Proc. IEEE Int. Conf. MEMS, 2003, pp. 243-246.
15. W. Piyawattanametha, E. D. Cocker, R. P. J. Barretto, J. C. Jung, B. A. Flusberg, R. Hyejun, O. Solgaard, and M. J. Schnitzer, "A portable two-photon fluorescence microendoscope based on a two-dimensional scanning mirror," in Proc. IEEE/LEOS Int. Conf. Opt. MEMS Nanophotonics, 2007, pp. 6-7.
16. C. Chong, K. Isamoto, and H. Toshiyoshi, "Optically modulated MEMS scanning endoscope," IEEE Photon. Technol. Lett., vol. 18, no. 1, pp. 133-135, Jan. 2006.
17. A. D. Aguirre, P. R. Hertz, Y. Chen, J. G. Fujimoto, W. Piyawattanametha, L. Fan, and M. C. Wu, "Two-axis MEMS scanning catheter for ultrahigh resolution three-dimensional and En face imaging," OSA Opt. Express, vol. 15, no. 5, pp. 2445-2453, 2007.
18. R. Hyejun, W. Piyawattanametha, Y. Taguchi, D. Lee, M. J. Mandella, and O. Solgaard, "Two-dimensional MEMS scanner for dual-axes confocal microscopy," J. Microelectromech. Syst., vol. 16, no. 4, pp. 969-976, Aug. 2007.
19. Sankaranand, U. Raghunath, T. Srinivas, and K. S. Gurumurthy, "MEMS based vision correction using adaptive optics," in Proc. TENCON, 2006, pp. 1-4.
20. I. W. Jung, Y. A. Peter, E. Carr, J. S. Wang, and O. Solgaard, "Single-crystal-silicon continuous membrane deformable mirror array for adaptive optics in space-based telescopes," IEEE J. Sel. Topics Quantum Electron., vol. 13, no. 2, pp. 162-167, Mar./Apr. 2007.
21. J. B. Sampsell, "An overview of Texas instruments digital micromirror device (DMD) and its application to projection displays," in Proc. Int. Symp. Soc. Inf. Display, May 1993, vol. 24, pp. 1012-1015.
22. L. J. Hornbeck, "Current status of the Digital Micromirror Device (DMD) for projection television applications (Invited Paper)," in IEDM Tech. Dig., 1993, pp. 381-384.
23. DLP Discovery. Online. Available: http://focus.ti.com/dlpdmd/docs/ dlplearningdetail.tsp?sectionId=62&tabId=2250
24. P. F. Van Kessel, L. J. Hornbeck, R. E. Meier, and M. R. Douglass, "A MEMS-based projection display," Proc. IEEE, vol. 86, no. 8, pp. 1687-1704, Aug. 1998.
25. O. Solgaard, F. S. A. Sandejas, and D. M. Bloom, "Deformable grating optical modulator," Opt. Lett., vol. 17, no. 9, pp. 688-690, May 1992.
26. Interferometric Modulator (IMOD) Technology Overview. [Online]. Available: http://www.qualcomm.com/common/documents/white_papers/ QMT_Technology_Overview_12-07.pdf
27. Y. Taii, A. Higo, H. Fujita, and H. Toshiyoshi, "Transparent color pixels using plastic MEMS technology for electronic papers," IEICE Electron. Express, vol. 3, no. 6, pp. 97-101, 2006.
28. Y. Taii, A. Higo, H. Fujita, and H. Toshiyoshi, "Flexible transparent display by plastic MEMS," in Proc. 12th Int. Display Workshop/Asia Display, 2005, pp. 2021-2024.
29. J. Yan, S. T. Kowel, H. J. Cho, C. H. Ahn, G. P. Nordin, and J. H. Kulick, "Autostereoscopic three-dimensional display based on a micromirror array," Appl. Opt., vol. 43, no. 18, pp. 3686-3696, Jun. 2004.
30. J. Yan, S. T. Kowel, H. J. Cho, and C. H. Ahn, "Real-time full-color three-dimensional display with a micromirror array," Opt. Lett., vol. 26, no. 14, pp. 1075-1077, Jul. 2001.
31. H. Urey, "Retinal scanning displays," in Encyclopedia of Optical Engineering, vol. 3, R. Driggers, Ed. New York: Marcel Dekker, 2003, pp. 2445-2457.
32. J. Yan, S. Luanava, and V. Casasanta, "Magnetic actuation for MEMS scanners for retinal scanning displays," in Proc. SPIE MOEMS Display Imaging Syst., San Jose, CA, 2003, vol. 4985, pp. 115-120.
33. M. Bayer, "Retinal scanning display - A novel HMD approach to army aviation," in Proc. SPIE Head Helmet-Mounted Displays VII, 2002, vol. 4711, pp. 202-213.
34. H. Urey, "Optical advantages in retinal scanning displays," Proc. SPIE, vol. 4021, pp. 20-26, Jun. 2002.
35. H. Urey, F. DeWitt, K. D. Powell, and M. Bayer, "High-frequency raster pinch correction scanner for retinal scanning displays," Proc. SPIE vol. 4561, pp. 45-54, Oct. 2001.
36. H. Urey, D. W. Wine, and T. Osborn, "Optical performance requirements for MEMS-scanner-based microdisplays," in Proc. SPIE MOEMS Miniaturized Syst., 2000, vol. 4178, pp. 176-185.
37. J. H. Lee, Y. C. Ko, D. H. Kong, J. M. Kim, K. B. Lee, and D. Y. Jeon, "Design and fabrication of scanning mirror for laser display," Sens. Actuators A, Phys., vol. 96, no. 2/3, pp. 223-230, Feb. 2002.
38. H. Schenk, P. Durr, D. Kunze, H. Lakner, and H. Kuck, "A resonantly excited 2D-micro-scanning-mirror with large deflection," Sens. Actuators A, Phys., vol. 89, no. 1/2, pp. 104-111, Mar. 2001.
39. J. H. Lee, Y. C. Ko, Y. K. Mun, B. S. Choi, J. M. Kim, and D. Y. Jeon, "Laser graphic video display using silicon scanning mirrors with vertical comb fingers," Jpn. J. Appl. Phys., vol. 41, no. 9, pp. 5868-5869, 2002.
40. M. Yoda, K. Isamoto, C. Chong, H. Ito, A. Murata, S. Kamisuki, M. Atobe, and H. Toshiyoshi, "MEMS 1D optical scanner for laser projection display using self-assembled vertical combs and scan-angle magnifying mechanism," in Tech. Dig. Transducers, 2005, pp. 968-971.
41. K. Castelino, V. Milanovic, and D. T. McCormick, "MEMS-based high-speed low-power vector display," in Proc. IEEE/LEOS Int. Conf. Opt. MEMS Appl., 2005, pp. 127-128.
42. H. Urey, A. D. Yalcinkaya, T. Montague, D. Brown, R. Sprague, O. Anac, C. Ataman, and I. Basdogan, "Two-axis MEMS scanner for display and imaging applications," in Proc. IEEE/LEOS Int. Conf. Opt. MEMS Appl. 2005, pp. 17-18.
43. H. Urey and R. Sprague, "Biaxial MEMS raster scanner with linear ramp drive," in Proc. IEEE-LEOS Opt. MEMS, 2003, pp. 161-162.
44. G. D. J. Su, W. Piyawattanmethna, R. Rollier, L. Fan, and M. C. Wu, "MEMS 2D scanning mirror for dynamic alignment in optical interconnect," in Proc. IPR, Santa Barbara, CA, Jul. 1999.
45. G. D. J. Su, H. Toshiyoshi, and M. C. Wu, "Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors," IEEE Photon. Technol. Lett., vol. 13, no. 6, pp. 606-608, Jun. 2001.
46. V. Milanović, K. Castelino, and D. McCormick, "Highly adaptable MEMS-based display with wide projection angle," in Proc. IEEE Int. Conf. MEMS, Kobe, Japan, 2007, pp. 143-146.
47. V. Milanović, G. Matus, and D. McCormick, "Tip-tilt-piston actuators for high fill-factor micromirror arrays," in Proc. Solid State Sens., Actuator Microsyst. Workshop, Hilton Head, SC, Jun. 6-10, 2004.
48. V. Milanović and K. Castelino, "Sub-100 μs setting time and low voltage operation for gimbal-less two axis scanners," in Proc. Opt. MEMS, Takamatsu, Japan, Aug. 2004, pp. 182-183.
49. V. Milanović, K. Castelino, and D. McCormick, "Fully-functional tip-tilt-piston micromirror array," in Proc. IEEE/LEOS Opt. MEMS Appl. Conf., Big Sky, MT, Aug. 21, 2006, pp. 494-502.
50. V. Milanović, D. McCormick, and G. Matus, "Gimbal-less monolithic silicon actuators for tip-tilt-piston micromirror applications," IEEE J. Sel. Topics Quantum Electron., vol. 10, no. 3, pp. 462-471, Jun. 2004.
51. C. H. Ji, M. Choi, S. C. Kim, K. C. Song, J. U. Bu, and H. J. Nam, "Electromagnetic two-dimensional scanner using radial magnetic field," J. Microelectromech. Syst., vol. 16, no. 4, pp. 989-996, Aug. 2007.
52. R. B. Sprague, T. Montague, and D. Brown, "Bi-axial magnetic drive for scanned beam display mirrors," in Proc. SPIE MOEMS Display Imaging Syst. III, 2005, vol. 5721, pp. 1-13.
53. H. Urey, "Torsional MEMS scanner design for high-resolution display systems," in Proc. SPIE Opt. Scanning II, Jul. 2002, vol. 4773, pp. 27-37.
54. D. W. Wine, M. P. Helsel, L. Jenkins, H. Urey, and T. D. Osborn, "Performance of a biaxial MEMS-based scanner for microdisplay applications," Proc. SPIE, vol. 4178, pp. 186-196, Aug. 2000.
55. H. Urey, D. W. Wine, and T. D. Osborn, "Optical performance requirements for MEMS-scanner based microdisplays," in Proc. SPIE MOEMS Miniaturized Syst., 2000, vol. 4178, pp. 176-185.
56. T. S. Perry, "A dark-horse technology - The grating light valve - May join the competition to dethrone the CRT," IEEE Spectr., vol. 41, no. 4, pp. 38-41, Apr. 2004.
57. R. Apte, F. Sandejas, W. Banyai, and D. Bloom, "Grating light valves for high resolution displays," in Proc. Solid State Sens. Actuators Workshop, Jun. 1994, p. 343.
58. K. Takahashi, H. Fujita, H. Toshiyoshi, K. Suzuki, H. Funaki, and K. Itaya, "Tunable light grating integrated with high-voltage driver IC for image projection display," in Proc. IEEE 20th Int. Conf. MEMS 2007, pp. 147-150.
59. D. Bloom, "The grating light valve: Revolutionizing display technology," in Proc. SPIE Projection Displays Symp. III, 1997, vol. 3013, pp. 132-138.
60. D. T. Amm and R. W. Corrigan, "Optical performance of the grating light valve technology," in Proc. SPIE Projection Displays Symp. V, 1999, vol. 3634, pp. 71-78.
61. L. D. Paulson, "News briefs," Computer, vol. 39, no. 10, pp. 19-21, Oct. 2006.
62. Interferometric Modulator (IMod) Technology Overview - White Paper Qualcomm MEMS Technol. Inc., San Diego, CA, 2007.
63. H. Toshiyoshi, "MEMS for micro optics: From fiber optic communication to display," Proc. SPIE, vol. 6050, 605007, 2005.
64. Y. Taii, A. Higo, H. Fujita, and H. Toshiyoshi, "Electrostatically controlled transparent display pixels by PEN-film MEMS," in Proc. IEEE/LEOS Int. Conf. Opt. MEMS Appl., 2005, pp. 13-14.
65. H. Toshiyoshi, C. Lo, Y. Taii, and H. Fujita, "MEMS Fabry-Pérot pixels," in Proc. 20th Annu. Meeting IEEE Lasers Electro-Optics Soc. 2007, pp. 284-285.
66. A. Nakai, K. Hoshino, K. Matsumoto, and I. Shimoyama, "Transmissive scanning micromirrors for autostereoscopic display," in Proc. IEEE Int. Conf. MEMS, 2006, pp. 40-43.
67. A. Nakai, K. Hoshino, K. Matsumoto, and I. Shimoyama, "Double-sided scanning micromirror array for autostereoscopic display," Sens. Actuators A, Phys., vol. 135, no. 1, pp. 80-85, Mar. 2007.
68. J. Yan, S. Luanava, and V. Casasanta, "Magnetic actuation for MEMS scanners for retinal scanning displays," in Proc. SPIE MOEMS Display Imaging Syst., 2003, pp. 115-120.
69. M. Freeman, "Miniature high-fidelity displays using a biaxial MEMS scanning mirror," in Proc. SPIE MOEMS Display Imaging Syst., 2003, vol. 4985, pp. 56-62.
70. A. D. Yalcinkaya, H. Urey, D. Brown, T. Montague, and R. Sprague, "Two-axis electromagnetic microscanner for high resolution displays," J. Microelectromech. Syst., vol. 15, no. 4, pp. 786-794, Aug. 2006.
71. A. D. Yalcinkaya, H. Urey, and S. Holmstrom, "NiFe plated biaxial MEMS scanner for 2-D imaging," IEEE Photon. Technol. Lett., vol. 19, no. 5, pp. 330-332, Mar. 2007.
72. H. Urey, F. A. DeWitt, IV, P. A. Lopez, and J. Tauscher, "MEMS sinusoidal raster correction scanner for SXGA displays," in Proc. SPIE MOEMS Display Imaging Syst., Jan. 2003, vol. 4985, pp. 106-114.