Bottom and top electrodes nature and PZT film thickness influence on electrical properties

Sensors and Actuators, A: Physical

Volumn 158, Issue 1, 2010, Pages 99-105

  Sama, Nossikpendou ^a   Soyer, Caroline ^a   Remiens, Denis ^a   Verrue, Corentin ^a   Bouregba, Rachid ^b  

^a INSTITUT D ELECTRONIQUE   (France)

^b UNIVERSITÉ DE CAEN   (France)

Author keywords

Interfaces effects; LaNiO3; Pt; PZT film; Thickness dependence

Indexed keywords

BOTTOM ELECTRODES; COERCIVE FIELD; CRYSTALLOGRAPHIC ORIENTATIONS; DIELECTRIC CONSTANTS; DIELECTRIC MEASUREMENTS; DIFFERENT STRUCTURE; ELECTRICAL PROPERTY; FERROELECTRIC AND PIEZOELECTRIC PROPERTIES; FERROELECTRIC PROPERTY; LASER DOPPLER VIBROMETERS; MAXIMUM VALUES; PIEZOELECTRIC RESPONSE; PT ELECTRODE; PZT; PZT FILM; SILICON SUBSTRATES; THICKNESS DEPENDENCE;

COERCIVE FORCE; ELECTRIC PROPERTIES; ELECTRODES; FERROELECTRICITY; MAGNETIC FILMS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

PLATINUM;

EID: 76349119462     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.11.032     Document Type: Article

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