Technology of reflective membranes for spatial light modulators

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 468-472

  Sakarya, S ^a   Vdovin, G ^a   Sarro, P M ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Adaptive optics; MEMS; Projection display; SLM; Spatial light modulator

Indexed keywords

DISPLAY DEVICES; ELECTRODES; ELECTRONIC EQUIPMENT; ELECTROSTATICS; FABRICATION; LIGHT MODULATION; MEMBRANES; MICROELECTROMECHANICAL DEVICES; NITRIDES; OPTICAL PROPERTIES; TECHNOLOGY;

CONTINUOUS THIN NITRIDE MEMBRANE; GRID STRUCTURE; HIGH OPTICAL LOAD; OPTICAL FILL FACTOR; PROJECTION DISPLAYS; REFLECTIVE MEMBRANES; VISCOELASTIC LAYERS;

LIGHT MODULATORS;

EID: 18544399582     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00820-2     Document Type: Conference Paper

References (5)

1. A new Schlieren light valve for television projection
2. Deformable-mirror spatial light modulators
3. Theoretical analysis of an electrically addressed viscoelastic spatial light modulator
4. Electro optical performance of an improved deformable mirror device
5. Deformable micromirror devices as phase-modulating high-resolution light valves