Resonantly excited 2D-micro-scanning-mirror with large deflection

Sensors and Actuators, A: Physical

Volumn 89, Issue 1-2, 2001, Pages 104-111

  Schenk, Harald ^a   Dürr, Peter ^a   Kunze, Detlef ^a   Lakner, Hubert ^a   Kück, Heinz ^b  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATICS; LASER BEAM EFFECTS; SCANNING; SILICON ON INSULATOR TECHNOLOGY;

ELECTROSTATIC DRIVING; FILLED TRENCH; MICROSCANNER; SHOCK RESISTIVITY; TWO DIMENSIONAL MICROSCANNER;

MIRRORS;

EID: 0011447482     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00529-X     Document Type: Article

References (8)

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