Optical MEMS devices based on moving waveguides

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 8, Issue 1, 2002, Pages 155-162

  Ollier, Eric ^a  

^a CEA GRENOBLE   (France)

Author keywords

Light deflectors; Microelectromechnical devices; Optical fiber communication; Optical planar waveguides; Optical switches; Vibration control

Indexed keywords

FIBER OPTIC SENSORS; MICROELECTROMECHANICAL DEVICES; OPTICAL COMMUNICATION; OPTICAL INSTRUMENT LENSES; OPTICAL SWITCHES; OPTICAL WAVEGUIDES; VIBRATION CONTROL;

LIGHT DEFLECTORS; MOVING WAVEGUIDES;

OPTICAL SYSTEMS;

EID: 0036244363     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.991411     Document Type: Article

References (23)

1. Opportunities for MEMS in lightwave networks
2. Digital light processing and MEMS: An overview
3. Performance evaluation of micromachined mirror arrays for adaptive optics
4. Microelectromechanical tunable filter with stable half symmetric cavity
5. Reflective duplexer based on silicon micromechanics for fiber-optic communication
6. Fabrication of a mechanical antireflection switch for fiber-to-the-home systems
7. Optical-layer networking: Opportunities for and progress in ligthwave micromachines
8. Bistable 2 × 2 and multistable 1 × 4 micromechanical fiber-optic switches on silicon
9. 4 × 4 fiber optic matrix switch based on MOEMS
10. Optical pressure sensor based on Mach-Zehnder interferometer integrated with a lateral a-Si: H p-i-n photodiode
11. Integrated optical sensors using micromechanical bridges and cantilevers
12. Thermo-optical digital switches on silicon
13. A micro-opto-mechanical switch on integrated optics on silicon
14. Development of prototype micromechanical optical switch
15. GaAs-based micromechanical waveguide switch
16. Silicon on insulator (SOI) movable integrated optical waveguide technology
17. An SOI optical microswitch integrated with silicon waveguides and touch-down micromirror actuators
18. Bottlenecks of opto-MEMS, micro-opto-electro-mechanical systems
19. Compact optical cross-connect switch based on total internal reflection in a fluid-containing planar circuit
20. 1 × 8 micro-mechanical switches based on moving waveguides for optical fiber network switching
21. A 8 × 8 all optical space-switch based on a novel 8 × 1 MOEMS switching module
22. Micro-opto-mechanical vibration sensor integrated on silicon
23. Integrated silica microopto-mechanical steering device for laser beam scanning