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Volumn 42, Issue 8, 2009, Pages
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The gain and loss of energy by electrons in the RF-CCP sheath
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Author keywords
[No Author keywords available]
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Indexed keywords
AMBIPOLAR;
CAPACITIVELY COUPLED PLASMAS;
CONDUCTION CURRENT;
ELECTRON ENERGIES;
ELECTRON ENERGY PROBABILITY FUNCTIONS;
ELECTRON HEATING;
ELECTRON LOSS;
ELECTRON TRAJECTORIES;
ENERGETIC ELECTRON;
HARD WALLS;
LOSS OF ENERGY;
LOW ENERGY ELECTRONS;
LOWER ENERGIES;
MONTE CARLO SIMULATION;
ONE-DIMENSIONAL MODEL;
RADIO FREQUENCIES;
SHEATH REGIONS;
COMPUTER SIMULATION;
DISSOCIATION;
ELECTRIC DISCHARGES;
ELECTRIC FIELDS;
ELECTRIC NETWORK ANALYSIS;
ELECTRON ENERGY LEVELS;
ENGINEERING EXHIBITIONS;
INDUCTIVELY COUPLED PLASMA;
MONTE CARLO METHODS;
PLASMA DIAGNOSTICS;
PLASMA HEATING;
PLASMA SHEATHS;
ELECTRONS;
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EID: 70350449268
PISSN: 00223727
EISSN: 13616463
Source Type: Journal
DOI: 10.1088/0022-3727/42/8/085205 Document Type: Article |
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Times cited : (6)
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References (19)
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