Multidimensional kinetic-fluid simulation of inductive discharges

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 7 SUPPL. B, 1997, Pages 4784-4788

  Turner, M M ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

Collisionless heating; Inductive discharge; Kinetic simulation; Kinetic fluid equations

Indexed keywords

COMPUTER SIMULATION; ELECTRIC DISCHARGES; REACTIVE ION ETCHING;

COLLISIONLESS HEATING; INDUCTIVE DISCHARGES; KINETIC FLUID EQUATIONS;

PLASMA THEORY;

EID: 0031176088     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.4784     Document Type: Article

References (23)

1. J. H. Keller: Plasma Sources Sci. Technol. 5 (1996) 166.
2. M. M. Turner: Phys. Rev. Lett. 71 (1993) 1844.
3. V. A. Godyak, R. B. Piejak and B. M. Alexandrovich: Plasma Sources Sci. Technol. 3 (1994) 169.
4. R. Stewart, P. Vitello and D. B. Graves: J. Vac. Sci. Technol. B 12 (1994) 478.
5. M. J. Kushner, W. Z. Collison, M. J. Grapperhaus, J. P. Holland and M. S. Barnes: J. Appl. Phys. 80 (1996) 1337.
6. E. S. Weibel: Phys. Fluids 10 (1967) 741.
7. J. A. Reynolds, H. A. Blevin and P. C. Thonemann: Phys. Rev. Lett. 22 (1969) 762.
8. S. Ichimaru, Basic Principles of Plasma Physics: A Statistical Approach, (W. A. Benjamin, Reading, Massachusetts, 1973) Frontiers in Physics, Vol. 41.
9. V. Vahedi, M. A. Lieberman, G. DiPeso, T. D. Rognlien and D. Hewett: J. Appl. Phys. 78 (1995) 1446.
10. J. M. Berger, W. A. Newcomb, J. M. Dawson, E. A. Frieman, R. M. Kulsrud and A. Lenard: Phys. Fluids 1 (1958) 301.
11. M. R. Gibbons and D. W. Hewett: J. Comp. Phys. 120 (1995) 231.
12. P. L. G. Ventzek, R. J. Hoekstra and M. J. Kushner: J. Vac. Sci. Technol. B 12 (1994) 461.
13. U. Kortshagen, I. Pukropski and M. Zethoff: J. Appl. Phys. 76 (1994) 2048.
14. V. I. Kolobov, D. F. Beale, L. J. Mahoney and A. E. Wendt: Appl. Phys. Lett. 65 (1994) 537.
15. G. W. Hammett and F. W. Perkins: Phys. Rev. Lett. 64 (1990) 3019.
16. S. E. Parker and D. Carati: Phys. Rev. Lett. 75 (1995) 441.
17. M. M. Turner: Plasma Sources Sci. Technol. 5 (1996) 159.
18. R. H. Cohen and T. D. Rognlien: Plasma Sources Sci. Technol. 5 (1996) 442.
19. R. W. Hockney and J. W. Eastwood: Computer Simulation Using Particles (Adam Hilger, Bristol, 1988).
20. L. J. Mahoney, A. E. Wendt, E. Barrios, C. J. Richards and J. L. Shohet: J. Appl. Phys. 76 (1994) 2041.
21. J. Hopwood, C. R. Guarnieri, S. J. Whitehair and J. J. Cuomo: J. Vac. Sci. Technol. A 11 (1993) 147.
22. V. A. Godyak: "ICP Diagnostics with Magnetic Probes", 3rd Int. Workshop on Microwave Discharges, Fontevreau, France, April 21-25 1997.
23. M. S. Barnes, J. C. Forster and J. H. Keller: Appl. Phys. Lett. 62 (1993) 2622.