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Volumn 76, Issue 12, 1996, Pages 2069-2072

Heating mode transition induced by a magnetic field in a capacitive rf discharge

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0000751860     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.76.2069     Document Type: Article
Times cited : (87)

References (16)
  • 12
    • 0000959757 scopus 로고
    • Plasma Sources Sci
    • V. Vahedi et al, Plasma Sources Sci. Technol., 2: 273 (1993). PSTEEU
    • (1993) Technol. , vol.2 , pp. 273
    • Vahedi, V.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.