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Volumn 69, Issue 25, 1996, Pages 3818-3820

Stochastic electron heating in bounded radio-frequency plasmas

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0001151473     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117115     Document Type: Article
Times cited : (92)

References (15)
  • 3
    • 0003568792 scopus 로고
    • edited by M. H. Francombe and J. L. Vossen Academic, San Diego
    • O. A. Popov, in Physics of Thin Films, edited by M. H. Francombe and J. L. Vossen (Academic, San Diego, 1994).
    • (1994) Physics of Thin Films
    • Popov, O.A.1
  • 4
    • 3343015590 scopus 로고
    • M. M. Turner, Phys. Rev. Lett. 71, 1844 (1993); Plasma Sources Sci. Technol. 5, 159 (1996).
    • (1993) Phys. Rev. Lett. , vol.71 , pp. 1844
    • Turner, M.M.1
  • 5
    • 0030134705 scopus 로고    scopus 로고
    • M. M. Turner, Phys. Rev. Lett. 71, 1844 (1993); Plasma Sources Sci. Technol. 5, 159 (1996).
    • (1996) Plasma Sources Sci. Technol. , vol.5 , pp. 159
  • 11
    • 0001138011 scopus 로고
    • L. D. Tsendin, Plasma Sources Sci. Technol. 4, 200 (1995); V. I. Kolobov and V. A. Godyak, IEEE Trans. Plasma Sci. PS-23, 503 (1995).
    • (1995) Plasma Sources Sci. Technol. , vol.4 , pp. 200
    • Tsendin, L.D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.