Combined rf and transport effects in magnetized capacitive discharges

Journal of Applied Physics

Volumn 100, Issue 7, 2006, Pages

  Carter, M D ^a   Ryan, P M ^a   Hoffman, D ^b   Lee, W S ^b   Buchberger, D ^b   Godyak, V ^c  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b APPLIED MATERIALS INC   (United States)

^c OSRAM SYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE DISCHARGES; HELICON DISCHARGES; RF POWER DEPOSITION; RF RESPONSE;

ANISOTROPY; CAPACITANCE; MAGNETIC PROPERTIES; MAGNETIZATION; PLASMAS; TRANSPORT PROPERTIES;

ELECTRIC DISCHARGES;

EID: 33750021409     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2355436     Document Type: Article

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