Electron kinetics in radio-frequency magnetic fields of inductive plasma sources

Plasma Sources Science and Technology

Volumn 5, Issue 3, 1996, Pages 442-452

  Cohen, R H ^a   Rognlien, T D ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; COMPUTER SIMULATION; ELECTROMAGNETIC FIELD EFFECTS; ELECTRON TRANSPORT PROPERTIES; MAXWELL EQUATIONS; PLASMA HEATING; SKIN EFFECT;

ELECTRON DYNAMICS; FARADAY'S LAW; INDUCTIVE PLASMA SOURCES;

PLASMA SOURCES;

EID: 0030204899     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/3/013     Document Type: Article

References (19)

1. Lieberman M A and Gottscho R A 1994 Physics of Thin Films vol 18, ed M Francombe and J Vossen (New York: Academic) pp 1-119
2. Batchelor D B, Berry L A, Jaeger E F, Shaing K C and Whitson J C 1993 Bull. Am. Phys. Soc. 48 2122
3. Kolobov V I, Beale D F, Mahoney L J and Wendt A E 1994 Appl. Phys. Lett. 65 537
4. Vahedi V, Lieberman M A, De Peso G, Rognlien T D and Hewett D W 1995 J. Appl. Phys. 78 1446
5. Ventzek P L K, Hoekstra R J and Kushner M J 1994 J. Vac. Sci. Technol. B 12 461
6. Stewart R, Vitello P and Graves D B 1994 J. Vac. Sci. Technol. B 12 478
7. Di Peso G, Vahedi V, Hewett D W and Rognlien T D 1994 J. Vac. Sci. Technol. B 12 1387
8. Cohen R H and Rognlien T D 1996 Phys. Plasmas 3 1839
9. Motz H and Watson C J H 1967 Advances in Electron and Electronic Physics vol 23 (New York: Academic) p 168
10. Watori T, Hiroe S, Sato T and Ichimaru S 1974 Phys. Fluids 17 2107
11. Cary J R and Kaufman A N 1981 Phys. Fluids 24 1238
12. Turner M M 1993 Phys. Rev. Lett. 71 1844; 1996 Plasma Sources Sci. Technol. 5 159
13. Turner M M 1993 Phys. Rev. Lett. 71 1844; 1996 Plasma Sources Sci. Technol. 5 159
14. Gibbons M R and Hewett D W 1995 J. Comput. Phys. 120 231
15. See, for example, Lichtenberg A J and Lieberman M A 1983 Regular and Stochastic Motion (New York: Springer)
16. Smith G R and Cohen B I 1983 Phys. Fluids 26 238
17. See, for example, Birdsall C K and Langdon A B 1985 Plasma Physics via Computer Simulation (New York: McGraw-Hill) p 14
18. Di Peso G, Rognlien T D, Vahedi V and Hewett D W 1995 IEEE Trans. Plasma Sci. 23 550
19. Cohen R H, Rowlands G and Foote J H 1978 Phys. Fluids 21 627