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Volumn 5, Issue 2, 1996, Pages 159-165

Simulation of kinetic effects in inductive discharges

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELD EFFECTS; ELECTRONS; ENERGY DISSIPATION; EQUATIONS OF MOTION; INDUCED CURRENTS; KINETIC THEORY OF GASES; MAGNETIC FIELD EFFECTS; PLASMA FLOW; PLASMA SIMULATION; PLASMA THEORY; THERMAL EFFECTS; VISCOSITY;

EID: 0030134705     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/2/007     Document Type: Article
Times cited : (34)

References (29)
  • 19
    • 0004278048 scopus 로고
    • New York: American Institute of Physics
    • Stix T H 1992 Waves in Plasmas (New York: American Institute of Physics)
    • (1992) Waves in Plasmas
    • Stix, T.H.1
  • 20
    • 0030204899 scopus 로고    scopus 로고
    • Electron kinetics in radio-frequency magnetic fields of inductive plasma sources
    • accepted for publication
    • Cohen R H and Rognlien T D 1996 Electron kinetics in radio-frequency magnetic fields of inductive plasma sources Plasma Sources Sci. Technol. 5 accepted for publication
    • (1996) Plasma Sources Sci. Technol. , vol.5
    • Cohen, R.H.1    Rognlien, T.D.2
  • 21
    • 0000287450 scopus 로고    scopus 로고
    • Induced magnetic field effects in inductively coupled plasmas
    • submitted
    • Cohen R H and Rognlien T D 1996 Induced magnetic field effects in inductively coupled plasmas Phys. Plasmas submitted
    • (1996) Phys. Plasmas
    • Cohen, R.H.1    Rognlien, T.D.2
  • 27
    • 0028729206 scopus 로고
    • Spatial profiles of plasma properties in planar RF inductive discharges-1 Role of chamber length and 2 Anisotropy of electron velocity distributions
    • paper 2C6
    • Mahoney L J, Wendt A E and Shohet J L 1994 Spatial profiles of plasma properties in planar RF inductive discharges-1) Role of chamber length and 2) Anisotropy of electron velocity distributions IEEE Int. Conf. on Plasma Science, Sante Fe, New Mexico, 1994 paper 2C6
    • (1994) IEEE Int. Conf. on Plasma Science, Sante Fe, New Mexico, 1994
    • Mahoney, L.J.1    Wendt, A.E.2    Shohet, J.L.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.