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Czechoslovak Journal of Physics

Volumn 48, Issue SUPPL. 2, 1998, Pages 59-69

Modelling of radio frequency sheaths for plasma processing

(1) Turner, M M a

a DUBLIN CITY UNIVERSITY (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040120830 PISSN: 00114626 EISSN: None Source Type: Journal
DOI: 10.1007/s10582-998-0022-z Document Type: Article

Times cited : (1)

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