PZT thin-film meso- and micro devices

Ferroelectrics

Volumn 342, Issue 1, 2006, Pages 15-34

  Shen, I Y ^a   Cao, G Z ^b   Wu, Chia Che ^c   Lee, Cheng Chun ^a  

^a University of Washington   (United States)

^b UNIVERSITY OF WASHINGTON   (United States)

^c NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Bandwidth; Corner frequencies; Finite element analysis; Microactuators; Piezoelectric constants; PZT thin films; Quality factor; Soft lithography; Sol electrophoresis; Sol gel process

Indexed keywords

CORNER FREQUENCY; FINITE ELEMENT ANALYSIS; PIEZOELECTRIC CONSTANT; PZT THIN FILM; QUALITY FACTORS; SOFT LITHOGRAPHY; SOL ELECTROPHORESIS;

BANDWIDTH; CRACKS; ELECTROPHORESIS; FINITE ELEMENT METHOD; GELS; MICROACTUATORS; NANOSTRUCTURED MATERIALS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; Q FACTOR MEASUREMENT; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING; SEMICONDUCTING LEAD COMPOUNDS; SOL-GELS; SOLS; THIN FILM DEVICES; THIN FILMS;

SOL-GEL PROCESS;

EID: 35349014162     PISSN: 00150193     EISSN: 15635112     Source Type: Journal    
DOI: 10.1080/00150190600946062     Document Type: Conference Paper

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