Ultraviolet depth lithography and galvanoforming for micromachining

Journal of the Electrochemical Society

Volumn 143, Issue 1, 1996, Pages 237-244

  Lochel B ^a   Maciossek, A ^a   Quenzer, H J ^a   Wagner, B ^a  

^a Fraunhofer Inst F S   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; COPPER ALLOYS; DEPOSITION; DRYING; ELECTROFORMING; ELECTROPLATING; LITHOGRAPHY; MOLDING; PHOTORESISTS; SURFACES; ZINC ALLOYS;

GALVANOFORMING; GALVANOPLATING; MAGNETIC ALLOYS; STANDARD PROCESSES; SURFACE MICROMACHINING; THREE DIMENSIONAL MICROCOILS; THREE DIMENSIONAL ULTRAVIOLET MICROFORMING PROCESS; THREE DIMENSIONAL WIRING SYSTEMS; ULTRAVIOLET DEPTH LITHOGRAPHY;

MICROMACHINING;

EID: 0029755572     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1836415     Document Type: Article

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