Fabrication and characterization of diamond AFM probe integrated with PZT thin film sensor and actuator

Sensors and Actuators, A: Physical

Volumn 114, Issue 2-3, 2004, Pages 398-405

  Shibata, Takayuki ^a   Unno, Kazuya ^b   Makino, Eiji ^c   Shimada, Shiro ^b  

^a IBARAKI UNIVERSITY   (Japan)

^b HOKKAIDO UNIVERSITY   (Japan)

^c HIROSAKI UNIVERSITY   (Japan)

Author keywords

Diamond AFM probe; Diamond thin film; Piezoelectric actuator; Piezoelectric constant; Piezoelectric sensor; PZT thin film

Indexed keywords

ACTUATORS; ANNEALING; ATOMIC FORCE MICROSCOPY; LEAD COMPOUNDS; PEROVSKITE; PIEZOELECTRIC DEVICES; PROBES; REACTIVE ION ETCHING; SENSORS; SPUTTERING; TEMPERATURE CONTROL; THICKNESS CONTROL; TITANIUM COMPOUNDS; ZIRCONIUM COMPOUNDS;

DIAMOND AFM PROBE; PIEZOELECTRIC ACTUATOR; PIEZOELECTRIC CONSTANT; PIEZOELECTRIC SENSOR;

DIAMOND FILMS;

EID: 4344590016     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.11.025     Document Type: Article

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