Design and fabrication of 1D and 2D micro scanners actuated by double layered lead zirconate titanate (PZT) bimorph beams

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 6 B, 2002, Pages 4321-4326

  Tsaur, Jiunnjye ^a   Zhang, Lulu ^a   Maeda, Ryutaro ^a   Matsumoto, Sohei ^a   Khumpuang, Sommawan ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Deflection angle; DPZT; Microscanner; Scanning angle; Sol gel method

Indexed keywords

BENDING (DEFORMATION); CRYSTALLIZATION; HEAT TREATMENT; MICROACTUATORS; NATURAL FREQUENCIES; PEROVSKITE; RESIDUAL STRESSES; SOL-GELS; SPIN COATING;

BIMORPH BEAMS; DEFLECTION ANGLES; MICRO SCANNERS;

MICROOPTICS;

EID: 0036614043     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.4321     Document Type: Article

References (14)