Lead zirconate titanate films for d33 mode cantilever actuators

Sensors and Actuators, A: Physical

Volumn 105, Issue 1, 2003, Pages 91-97

  Zhang, Q Q ^a,b   Gross, S J ^b   Tadigadapa, S ^b   Jackson, T N ^b   Djuth, F T ^a   Trolier McKinstry, S ^b  

^a Geospace Research Inc   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Cantilever; Lead zirconate titanate; MEMS; Piezoelectric

Indexed keywords

CRYSTALLIZATION; DEPOSITION; ELECTROCHEMICAL ELECTRODES; FERROELECTRICITY; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PEROVSKITE; PIEZOELECTRIC DEVICES; POLARIZATION; SILICON NITRIDE; THIN FILMS;

RESONANCE FREQUENCIES;

ACTUATORS;

EID: 0038321291     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00068-2     Document Type: Article

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