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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3419, Issue , 1998, Pages 227-235

Two-dimensional micro optical scanner excited by PZT thin film microactuator

Author keywords

Integration; Microactuator; Micromachining; Optical scanner; Piezores istor; PZT; Resonator; Silicon; Thin film; Two dimensional

Indexed keywords

LASER APPLICATIONS; MICROACTUATORS; MICROOPTICS; OPTICAL SENSORS; PIEZOELECTRIC DEVICES; RESISTORS; RESONATORS; SCANNING; SEMICONDUCTING SILICON; THIN FILMS;

MICRO OPTICAL SCANNERS;

OPTOELECTRONIC DEVICES;

EID: 0032401671 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.311013 Document Type: Conference Paper

Times cited : (10)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.