The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin films

Sensors and Actuators, A: Physical

Volumn 71, Issue 1-2, 1998, Pages 133-138

  Shepard Jr , J F ^a   Moses, P J ^a   Trolier McKinstry, S ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

PZT; Thin films; Transverse piezoelectric coefficient

Indexed keywords

BENDING (DEFORMATION); CALCULATIONS; ELECTRIC CHARGE; LEAD COMPOUNDS; THIN FILMS; TITANIUM DIOXIDE; ZIRCONIA;

MIXED OXIDES; PZT;

PIEZOELECTRIC MATERIALS;

EID: 0032207172     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00161-7     Document Type: Article

References (23)

1. P. Muralt, A. Kholkin, M. Kohli, T. Maeder, N. Setter, Characterization of PZT thin films for micromotors, Microelectron. Eng. 29 (1995) 67-70.
2. D.L. Polla, L.F. Francis, Ferroelectric thin films in microelectromechanical applications, MRS Bull., July, 1996, pp. 59-65.
3. A.L. Kholkin, C. Wutchrich, D.V. Taylor, N. Setter, Interferometric measurements of electric field-induced displacements in piezoelectric thin films, Rev. Sci. Instr. 67 (1996) 1935-1941.
4. K. Lefki, G.J.M. Dormans, Measurement of piezoelectric coefficients of ferroelectric thin films, J. Appl. Phys. 76 (1994) 1764-1767.
5. Q.M. Zhang, W.Y. Pan, L.E. Cross, Laser interferometer for the study of piezoelectric and electrostrictive strains, J. Appl. Phys. 63 (1988) 2492-2496.
6. W.Y. Pan, L.E. Cross, A sensitive double beam laser interferometer for studying high-frequency piezoelectric and electrostrictive strains, Rev. Sci. Instr. 60 (1989) 2701-2704.
7. J.F. Li, P. Moses, D. Viehland, Simple, high-resolution interferometer for the measurement of frequency-dependent complex piezoelectric responses in ferroelectric ceramics, Rev. Sci. Instr. 66 (1995) 215-221.
8. 3 thin films using X-ray diffraction, Mater. Res. Soc. Symp. Proc. 361 (1995) 111-116.
9. J.F. Shepard Jr., S. Trolier-McKinstry, M.A. Hendrickson, R. Zeto, Properties of PZT thin films as a function of in-plane biaxial stress, Proceedings of the 10th International Symposium on Applications of Ferroelectrics, New Brunswick, NJ, 1996, Vol. 1, pp. 161-165.
10. 31-coefficient PZT thin film for micro actuators, Proceedings of the 9th Annual International Workshop on Micro Electro Mechanical Systems, San Diego, CA, 1996, pp. 263-266.
11. M. Toyama, R. Kubo, E. Takata, K. Tanaka, K. Ohwada, Characterization of piezoelectric properties of PZT thin films deposited on Si by ECR sputtering, Sensors and Actuators A 45 (1994) 125-129.
12. A. Ugural, Stresses in Plates and Shells, McGraw-Hill, 1981.
13. R.J. Roark, W.C. Young, Formulas for Stress and Strain, 6th edn., McGraw-Hill, New York, 1989.
14. W.A. Brantley, Calculated elastic constants for stress problems associated with semiconductor devices, J. Appl. Phys. 44 (1973) 534-535.
15. J. Schweitz, Mechanical characterization of thin films by micromechanical techniques, MRS Bull., July, 1992, pp. 34-45.
16. P. Luginbuhl, G.-A. Racine, P. Lerch, B. Romanowicz, K.G. Brooks, N.F. de Rooij, P. Renaud, N. Setter, Piezoelectric cantilever beams actuated by PZT sol-gel thin film, Sensors and Actuators A 54 (1996) 530-535.
17. S. Watanabe, T. Fujiu, T. Fujii, Effect of poling on piezoelectric properties of lead zirconate titanate thin films formed by sputtering, Appl. Phys. Lett. 66 (1995) 1481-1483.
18. T. Tuchiya, T. Itoh, G. Sasaki, T. Suga, Preparation and properties of piezoelectric lead zirconate titanate thin films for microsensors and microactuators by sol-gel processing, J. Ceram. Soc. Jpn. 104 (1996) 159-163.
19. J.F. Shepard Jr., S. Trolier-McKinstry, to be submitted to Sensorsand Actuators (1998).
20. 3, PZT and PLZT thin films, Br. Ceram. Proc. 36 (1985) 107-121.
21. Joseph F. Shepard Jr. is a doctoral candidate in Materials Science and Engineering at the Pennsylvania State University. He received his bachelor's degree in Mechanical Engineering from Syracuse University in 1992 and a masters degree in Materials Science from Penn State in 1995. His current research interests include the deposition and characterization of piezoelectric/ferroelectric thin films for utilization in microelectromechanical systems.
22. Paul Moses is a senior research assistant in the Materials Research Laboratory of the Pennsylvania State University. His focus is the construction of electronic equipment for the fabrication and characterization of ferroelectric materials. He holds a bachelor's degree in Mathematics from Penn State and has worked for universities and private companies in countries as far west as China and as far east as Switzerland.
23. Susan Trolier-McKinstry is an assistant professor in the Materials Science and Engineering Department at the Pennsylvania State University with a joint appointment with the Intercollege Materials Research Laboratory. Her main research interests include ferroelectric thin films for actuator applications, the development of texture in bulk ceramic piezoelectrics, and spectroscopic ellipsometry. She is a member of the American Ceramic Society, the Materials Research Society, and the IEEE. In the past few years she has helped organize MRS symposia on Materials for Smart Systems and the International Symposium on Applications of Ferroelectrics.