A novel wet etch for patterning lead zirconate-titanate (PZT) thin-films

Integrated Ferroelectrics

Volumn 29, Issue 3-4, 2000, Pages 225-231

  Miller, Raanan A ^a   Bernstein, Jonathan J ^a  

^a CHARLES STARK DRAPER LABORATORY   (United States)

Author keywords

PZT wet etch; Thin film PZT

Indexed keywords

EID: 0347303114     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584580008222241     Document Type: Article

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