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Applied Surface Science

Volumn 195, Issue 1-4, 2002, Pages 63-73

Effect of in situ Pt bottom electrode deposition and of Pt top electrode preparation on PZT thin films properties

(5) Vilquin, B a Le Rhun, G a Bouregba, R a Poullain, G a Murray, H a

a UNIVERSITÉ DE CAEN (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIFERROELECTRIC MATERIALS; COMPOSITION; ELECTROCHEMICAL ELECTRODES; ELECTRODEPOSITION; FERROELECTRIC MATERIALS; FILM GROWTH; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; PLATINUM; STRUCTURE (COMPOSITION); SYNTHESIS (CHEMICAL);

ELECTRODE PREPARATION;

THIN FILMS;

EID: 0037099255 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(02)00554-8 Document Type: Article

Times cited : (29)

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