Piezoelectric cantilever beams actuated by PZT sol-gel thin film

Sensors and Actuators, A: Physical

Volumn 54, Issue 1-3, 1996, Pages 530-535

  Luginbuhl, Ph ^a   Racine, G A ^a   Lerch, Ph ^b   Romanowicz, B ^b   Brooks, K G ^b   De Rooij, N F ^a   Renaud, Ph ^b   Setter, N ^b  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b EPFL   (Switzerland)

Author keywords

Lead zirconium titanate; Piezoelectric cantilevers; Sol gel

Indexed keywords

EID: 0001297810     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(95)01196-X     Document Type: Article

References (6)

1. T. Itoh and T. Suga, Development of a force sensor for atomic force microscopy using piezoelectric thin films, Nanotechnology, 4 (1993) 218-224.
2. K. Brooks, D. Damjanovic, N. Setter, Ph. Luginbuhl, G.-A. Racine and N.F. de Rooij, Piezoelectric response of PZT thin film actuated micromachined silicon cantilever beams, 9th IEEE Int. Symp. Applications of Ferroelectrics (ISAF '94), University Park, PA, USA, Aug. 1994, pp. 520-522.
3. K. Brooks, D. Damjanovic, A. Kholkin, I. Reaney, N. Setter, Ph. Luginbuhl, G.-A. Racine, N.F. de Rooij and A. Saaman, PZT films for micropumps, Proc. 6th Int. Symp. Integrated Ferroelectrics, Monterey, CA, USA, March 1994, pp. 757-767.
4. G.-A. Racine, R. Luthier, Ph. Luginbuhl, K. Brooks, N. Setter and N.F. de Rooij, Hybrid ultrasonic elastic force motors micromachined in silicon, Proc. 6th Int. Symp. Integrated Ferroelectrics, Monterey, CA, USA, March 1994, pp. 769-778.
5. J.G. Smits and W.-S. Choi, The constituent equations of piezoelectric heterogeneous bimorphs, IEEE Trans. Ultrasonics, Ferroelectrics, Freq. Control, 38 (1991) 256-270.
6. B. Jaffe, W.R. Cook and H. Jaffe, Piezoelectric Ceramics, Academic Press, New York, 1971, pp. 29, 146.