Structure and electrical properties of multilayer PZT films prepared by sol-gel processing

Ceramics International

Volumn 26, Issue 5, 2000, Pages 501-506

  Miyazawa, Kun'Ichi ^a   Ito, Kunio ^a   Maeda, Ryutaro ^b  

^a UNIVERSITY OF TOKYO   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; COATING TECHNIQUES; CRYSTAL ORIENTATION; FILM PREPARATION; FIRING (OF MATERIALS); LEAD COMPOUNDS; MULTILAYERS; PERMITTIVITY; PEROVSKITE; SOL-GELS; SURFACE ROUGHNESS; THERMAL EFFECTS;

LEAD ZIRCONATE TITANATE; SPIN COATING;

DIELECTRIC FILMS;

EID: 0033704856     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0272-8842(99)00085-1     Document Type: Article

References (5)

1. A. Schroth, M. Ichiki, R. Maeda, J. Akedo, Characterization and application of jet-printed thin PZT layers for actuation of MEMS, Proc. of SPIE on Smart Electronics and MEMS, Vol. 3242, pp. 380-387.
2. Sayer M., Barrow D.A., Noteboom R., Griswold E.M., Wu Z. Piezoelectric and ferroelectic devices. potential and issues Auciello O., Auciello R. Science and Technology of Electroceramic Thin Films. 1994;399-412 Kluwer Academic Publishers.
3. K. Miyazawa, Y. Katsukawa, Y. Mizuno, Preparation of thick PZT films by sol-gel processing, Proceedings of the 12th Japan-Korea Seminar on Ceramics, Tsukuba, Japan, 5-7 December 1995, pp. 214-218.
4. K. Miyazawa, Y. Yamashita, T. Kuzumaki, K. Ito, J. Mayer, M. Rühle, Characterization of sol-gel derived multilayer PZT films, Proceedings of International Conference on Microstructures and Functions of Materials, 9-11 September 1996, Tokyo, Japan.
5. 3 films prepared by sol-gel processing. J. Am. Ceram. Soc. 81:1998;2333-2341.