PZT thin films grown by multi-target sputtering: Analysis of thin film stress

Integrated Ferroelectrics

Volumn 21, Issue 1-4, 1998, Pages 461-467

  Bruchhaus, R ^a   Pitzer, D ^a   Primig, R ^a   Schreiter, M ^a   Wersing, W ^a  

^a SIEMENS AG   (Germany)

Author keywords

Pyroelectric IR detector arrays; PZT thin films; Spontaneous distortion; Sputtering; Stress temperature plots; Thin film stress

Indexed keywords

FILM GROWTH; INFRARED DETECTORS; LATTICE CONSTANTS; LEAD COMPOUNDS; SPUTTER DEPOSITION; TENSILE STRESS; THIN FILMS;

CURIE TEMPERATURE; MULTI-TARGET SPUTTERING;

DIELECTRIC FILMS;

EID: 0032318340     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589808202086     Document Type: Article

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