Manufacturing process of piezoelectric thin-film dual-stage actuator and its reliability for HDD

IEEE Transactions on Magnetics

Volumn 38, Issue 5, 2002, Pages 2156-2158

  Kuwajima, Hideki ^a   Uchiyama, Hirokazu ^a   Ogawa, Yuko ^a   Kita, Hiroyuki ^a   Matsuoka, Kaoru ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

Dual stage actuator; Magnetic disk drive; Microactuator; Piezoelectric actuator; PZT

Indexed keywords

ACTUATORS; ATMOSPHERIC HUMIDITY; MAGNETIC THIN FILMS; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; THERMAL EFFECTS;

DUAL STAGE ACTUATORS;

HARD DISK STORAGE;

EID: 0036762330     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2002.802798     Document Type: Article

References (5)

1. H. Kuwajima and K. Matsuoka, "Thin film piezoelectric DSA for HDD," in Dig. IEEE Intermag Conf., vol. BS04, Amsterdam, The Netherlands, Apr. 2002.
2. 3 thin films," Appl. Phys. Lett., vol. 70, p. 1378, 1997.
3. 3 thin films and their crystallographic, pyroelectric, and ferroelectric properties," J. Appl. Phys., vol. 65, p. 1666, 1989.
4. 3 thin films," Sens. Actuators, vol. 77, pp. 106-112, 1999.
5. 3 thin film," Trans. Inst. Elec. Eng. Japan, vol. 120-E, no. 12, pp. 559-564, 2000.