Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions

Sensors and Actuators, A: Physical

Volumn 53, Issue 1-3, 1996, Pages 398-404

  Muralt, P ^a   Kholkin, A ^a   Kohli, M ^a   Maeder, T ^a  

^a EPFL   (Switzerland)

Author keywords

Piezoelectricity; Thin films; Ultrasonic actuators

Indexed keywords

EID: 30244506171     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)01139-9     Document Type: Article

References (19)

1. K.R. Udayakumar, S.F. Bart, A.M. Flynn, J. Chen, L.S. Tavrow, L.E. Cross, R.A. Brooks and D.J. Ehrlich, Ferroelectric thin film ultrasonic micromotors, Proc. IEEE-MEMS, Nara, Japan, 1991, pp. 109-113.
2. G.-A. Racine, R. Luthier and N.F. de Rooij, Hybrid ultrasonic micromachined motors, Proc. IEEE-MEMS 93, Fort Lauderdale, FL, USA, 1993, pp. 128-132.
3. R.M. Moroney, R.M White and R.T. Howe, Ultrasonic micromotors: physics and applications, Proc. IEEE-MEMS, Napa Valley, CA, USA, 1990, pp. 182-187.
4. See, e.g., P.R. Scheeper, A.G.H. van der Donk, W. Olthuis and P. Bergveld, A review of silicon microphones, Sensors and Actuators A, 44 (1994) 1-11.
5. P. Muralt, M. Kohli, T. Maeder, A. Kholkin, K. Brooks, R. Luthier and N. Setter, Fabrication and characterization of PZT thin film vibrators for micromotors, Sensors and Actuators A, 48 (1995) 157-165.
6. A.M. Flynn, L.S. Tavrow, S.F. Bart, R.A. Brooks, D.J. Ehrlich, K.R. Udayakumar and L.E. Cross, Piezoelectric micromotors for microrobots, J. Microelectromech. Syst., 1 (1992) 44-51.
7. T. Uchiki, T. Nakazawa, K. Nakamura, M. Kurosawa and S. Ueha, Ultrasonic motor utilizing elastic fin rotor, Jpn. J. Appl. Phys. 30 (1991) 2289-2291.
8. M. Kurosawa, T. Uchiki, H. Kanada, K. Nakamura and S. Ueha, Simulation and experimental study on elastic fin ultrasonic motor, IEEE Ultrasonics Symp. 92, Tucson, AZ, USA, 1992, pp. 893-896.
9. P. Muralt, A. Kholkin, M. Kohli, T. Maeder, K. Brooks and R. Luthier, Fabrication and characterization of PZT thin films for micromotors, ISIF'95, Colorado Springs, CO, USA, J. Integrated Ferroelectrics, 11 (1995) 213-220.
10. 2 electrodes, 1st Eur. Meet. Integrated Ferroelectrics, Nijmegen, Netherlands, 1995, J. Microelectron. Eng., 29 (1995) 177-180.
11. A. Kholkin et al., Interferometric study of piezoelectric degradation in ferroelectric thin films, 1st Eur. Meet. Integrated Ferroelectrics, Nijmegen, Netherlands, 1995, J. Microelectron. Eng., 29 (1995) 261-264.
12. I. Szabo, Höhere Technische Mechanik, Springer, Berlin, 1956.
13. A. Kholkin, Ch. Wüthrich, D. Taylor and N. Setter, Interferometric measurements of electric field-induced displacements in piezoelectric thin films, Rev. Sci. Instrum., 67 (5) (May) (1996).
14. K. Lefki and G.J.M. Dormans, Measurement of piezoelectric coefficients of ferroelectric thin films, J. Appl. Phys., 76 (1994) 1764-1767.
15. S. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells, McGraw-Hill, New York, 1959.
16. J. Söderkvist, Similarities between piezoelectric, thermal and other internal means of exciting vibrations, J. Micromech. Microeng., 3 (1993) 24-31.
17. 3 thin films for pyroelectric detectors, Proc. Int. Symp. Appl. Ferroelectrics (ISAF), PA, USA, 1994, pp. 691-694.
18. Landolt and Bernstein, Ferroelectrics: Oxides, New series III/16a, Springer, New York, 1981.
19. T. Ikeda, Fundamentals of Piezoelectricity, Oxford University Press, Oxford, 1990.