-
1
-
-
8344260493
-
Micromachined piezoelectric ultrasonic imaging transducer
-
H. Mohamed, D. Polla, E. Ebbini, and S. Zurn, "Micromachined piezoelectric ultrasonic imaging transducer," in Proc. 44th IEEE Midwest Symp. Circuits Syst., 2001, pp. 14-17.
-
(2001)
Proc. 44th IEEE Midwest Symp. Circuits Syst.
, pp. 14-17
-
-
Mohamed, H.1
Polla, D.2
Ebbini, E.3
Zurn, S.4
-
2
-
-
0035880213
-
Surface micromachined piezoelectric resonant beam filters
-
B. Piekarski, D. DeVoe, M. Dubey, R. Kaul, J. Conrad, and R. Zeto, "Surface micromachined piezoelectric resonant beam filters," Sens. Actuators A, vol. 91, pp. 313-320, 2001.
-
(2001)
Sens. Actuators A
, vol.91
, pp. 313-320
-
-
Piekarski, B.1
Devoe, D.2
Dubey, M.3
Kaul, R.4
Conrad, J.5
Zeto, R.6
-
3
-
-
0031388608
-
Ultrasonic PZT gas sensor using thick film technology
-
S. Gwirc, H. Gomez, C. Negreira, and L. Malatto, "Ultrasonic PZT gas sensor using thick film technology," in Proc. IEEE Ultrason. Symp., 1997, pp. 427-431.
-
(1997)
Proc. IEEE Ultrason. Symp.
, pp. 427-431
-
-
Gwirc, S.1
Gomez, H.2
Negreira, C.3
Malatto, L.4
-
4
-
-
0038029807
-
Pastes, inks and slurries
-
M. Prudenziati, Ed. Amsterdam, The Netherlands: Elsevier Sci.
-
M. Prudenziati, "Pastes, inks and slurries," in Thick Film Sensors. M. Prudenziati, Ed. Amsterdam, The Netherlands: Elsevier Sci., 1994.
-
(1994)
Thick Film Sensors
-
-
Prudenziati, M.1
-
5
-
-
19644376470
-
3 thick film micro actuator
-
3 thick film micro actuator," Jpn. J. Appl. Phys., vol. 37, pp. 7116-7119, 1998.
-
(1998)
Jpn. J. Appl. Phys.
, vol.37
, pp. 7116-7119
-
-
Maeda, R.1
Wang, Z.2
Chu, J.3
Schroth, A.4
Akedo, J.5
Ichiki, M.6
Yonekubo, S.7
-
6
-
-
0029521874
-
Characterisation of PZT thin films for micromotors
-
P. Muralt, A. Kholkin, M. Kohli, T. Maeder, and N. Setter, "Characterisation of PZT thin films for micromotors," Microelectron. Eng., vol. 29, pp. 67-70, 1995.
-
(1995)
Microelectron. Eng.
, vol.29
, pp. 67-70
-
-
Muralt, P.1
Kholkin, A.2
Kohli, M.3
Maeder, T.4
Setter, N.5
-
7
-
-
8344283386
-
PZT thin films integration for the realisation of a high pressure microsensor based on a vibrating membrane
-
E. Defaÿ, C. Millon, C. Malhaire, and D. Barbier, "PZT thin films integration for the realisation of a high pressure microsensor based on a vibrating membrane," Sens. Actuators A, vol. 3268, pp. 1-4, 2002.
-
(2002)
Sens. Actuators A
, vol.3268
, pp. 1-4
-
-
Defaÿ, E.1
Millon, C.2
Malhaire, C.3
Barbier, D.4
-
8
-
-
0035731209
-
Study of PZT coated membrane structures for micromachined ultrasonic transducers
-
P. Muralt, D. Schmitt, N. Ledermann, J. Baborowski, P. K. Weber, W. Steichen, S. Petitgrand, A. Bosseboeuf, N. Setter, and P. Gaucher, "Study of PZT coated membrane structures for micromachined ultrasonic transducers," in Proc. IEEE Ultrason. Symp., 2001, pp. 907-911.
-
(2001)
Proc. IEEE Ultrason. Symp.
, pp. 907-911
-
-
Muralt, P.1
Schmitt, D.2
Ledermann, N.3
Baborowski, J.4
Weber, P.K.5
Steichen, W.6
Petitgrand, S.7
Bosseboeuf, A.8
Setter, N.9
Gaucher, P.10
-
9
-
-
0034579979
-
Micromachined ultrasonic transducer using silicon nitride membrane fabricated in PECVD technology
-
G. Caliano, F. Galanello, A. Caronti, R. Carotenuto, and M. Pappalardo, "Micromachined ultrasonic transducer using silicon nitride membrane fabricated in PECVD technology," in Proc. IEEE Ultrason. Symp., 2000, pp. 963-968.
-
(2000)
Proc. IEEE Ultrason. Symp.
, pp. 963-968
-
-
Caliano, G.1
Galanello, F.2
Caronti, A.3
Carotenuto, R.4
Pappalardo, M.5
-
10
-
-
17344390056
-
Micromachined capacitive ultrasonic transducers fabricated using silicon on insulator wafers
-
E. Cianci, V. Foglietti, G. Caliano, and M. Pappalardo, "Micromachined capacitive ultrasonic transducers fabricated using silicon on insulator wafers," Microelectron. Eng., vol. 61-62, pp. 1025-1029, 2002.
-
(2002)
Microelectron. Eng.
, vol.61-62
, pp. 1025-1029
-
-
Cianci, E.1
Foglietti, V.2
Caliano, G.3
Pappalardo, M.4
-
11
-
-
1242310460
-
Development of piezoelectric micromachined ultrasonic transducers
-
F. Akasheh, T. Myers, J. D. Fraser, S. Bose, and A. Bandyopadhyay, "Development of piezoelectric micromachined ultrasonic transducers," Sens. Actuators A, vol. 111, pp. 275-287, 2004.
-
(2004)
Sens. Actuators A
, vol.111
, pp. 275-287
-
-
Akasheh, F.1
Myers, T.2
Fraser, J.D.3
Bose, S.4
Bandyopadhyay, A.5
-
12
-
-
0003999843
-
-
New York: Academic
-
B. Jaffe, W. R. Cook, Jr., and H. Jaffe, Piezoelectric Ceramics. New York: Academic, 1971, pp. 7-14.
-
(1971)
Piezoelectric Ceramics
, pp. 7-14
-
-
Jaffe, B.1
Cook Jr., W.R.2
Jaffe, H.3
-
13
-
-
0035174656
-
PZT thin film bulk acoustic wave resonator and filters
-
P. B. Kirby, Q. X. Su, E. Komuro, Q. Zhang, M. Imura, and R. W. Whatmore, "PZT thin film bulk acoustic wave resonator and filters," in Proc. IEEE Int. Freg. Contr. Symp. PDA Exhibition, 2001, pp. 687-694.
-
(2001)
Proc. IEEE Int. Freg. Contr. Symp. PDA Exhibition
, pp. 687-694
-
-
Kirby, P.B.1
Su, Q.X.2
Komuro, E.3
Zhang, Q.4
Imura, M.5
Whatmore, R.W.6
-
14
-
-
0029170316
-
Thick ceramic coating using a sol gel based ceramic-ceramic 0-3 composite
-
D. A. Barrow, T. E. Petroff, and M. Sayer, "Thick ceramic coating using a sol gel based ceramic-ceramic 0-3 composite," Surface Coating Technol., vol. 76-77, pp. 113-118, 1995.
-
(1995)
Surface Coating Technol.
, vol.76-77
, pp. 113-118
-
-
Barrow, D.A.1
Petroff, T.E.2
Sayer, M.3
-
15
-
-
0036497635
-
PZT 'composite' ferroelectric thick Sims
-
D. L. Corker, Q. Zhang, R. W. Whatmore, and C. Perrin, "PZT 'composite' ferroelectric thick Sims," J. Eur. Ceram. Soc., vol. 22, no. 3, pp. 383-390, 2002.
-
(2002)
J. Eur. Ceram. Soc.
, vol.22
, Issue.3
, pp. 383-390
-
-
Corker, D.L.1
Zhang, Q.2
Whatmore, R.W.3
Perrin, C.4
-
16
-
-
0034447932
-
Preparation of thick PZT films on stainless steel substrates
-
K. Li, H. L. W. Chan, K. W. Lee, and C. L. Choy, "Preparation of thick PZT films on stainless steel substrates," Integrated Ferroelect., vol. 30, pp. 253-260, 2000.
-
(2000)
Integrated Ferroelect.
, vol.30
, pp. 253-260
-
-
Li, K.1
Chan, H.L.W.2
Lee, K.W.3
Choy, C.L.4
-
17
-
-
0034886785
-
PZT-based piezoelectric composites via a modified sol-gel route
-
A. L. Kholkin, V. K. Yarmarkin, A. Wu, M. Avdeev, P. M. Vilarinho, and J. L. Baptista, "PZT-based piezoelectric composites via a modified sol-gel route," J. Eur. Ceram. Soc., vol. 21, pp. 1535-1538, 2001.
-
(2001)
J. Eur. Ceram. Soc.
, vol.21
, pp. 1535-1538
-
-
Kholkin, A.L.1
Yarmarkin, V.K.2
Wu, A.3
Avdeev, M.4
Vilarinho, P.M.5
Baptista, J.L.6
-
18
-
-
8344274220
-
The effect of repeated sol infiltrations on the microstructure and electrical properties of PZT composite sol gel films
-
R. A. Dorey, F. F. C. Duval, R. H. Haigh, and R. W. Whatmore, "The effect of repeated sol infiltrations on the microstructure and electrical properties of PZT composite sol gel films." Ferroelectrics, vol. 267, pp. 373-378, 2002.
-
(2002)
Ferroelectrics
, vol.267
, pp. 373-378
-
-
Dorey, R.A.1
Duval, F.F.C.2
Haigh, R.H.3
Whatmore, R.W.4
-
19
-
-
3142726995
-
Screen printed PZT thick films using composite film technology
-
R. A. Dorey, R. W. Whatmore, S. B. Beeby, R. N. Torah, and N. M. White, "Screen printed PZT thick films using composite film technology," Integrated Ferroelect., vol. 54, pp. 651-658, 2003.
-
(2003)
Integrated Ferroelect.
, vol.54
, pp. 651-658
-
-
Dorey, R.A.1
Whatmore, R.W.2
Beeby, S.B.3
Torah, R.N.4
White, N.M.5
-
20
-
-
0142075177
-
2/Pt electrode structure for lead containing ferroelectric thick films on silicon MEMS structures
-
2/Pt electrode structure for lead containing ferroelectric thick films on silicon MEMS structures," Thin Solid Films, vol. 444, pp. 235-240, 2003.
-
(2003)
Thin Solid Films
, vol.444
, pp. 235-240
-
-
Duval, F.F.C.1
Dorey, R.A.2
Haigh, R.H.3
Whatmore, R.W.4
-
21
-
-
8344263731
-
-
Material index, http://www.memsnet.org/material/.
-
Material Index
-
-
-
23
-
-
0035304946
-
Thin film bulk acoustic wave resonator and filters using ZnO and lead-zirconium-titanate thin film
-
Q. X. Su, P. B. Kirby, E. Komuro, M. Imura, Q. Zhang, and R. W. Whatmore, "Thin film bulk acoustic wave resonator and filters using ZnO and lead-zirconium-titanate thin film," IEEE Trans. Microwave Theory Tech., vol. 49, no. 4, pp. 769-778, 2001.
-
(2001)
IEEE Trans. Microwave Theory Tech.
, vol.49
, Issue.4
, pp. 769-778
-
-
Su, Q.X.1
Kirby, P.B.2
Komuro, E.3
Imura, M.4
Zhang, Q.5
Whatmore, R.W.6
-
26
-
-
8344223552
-
-
The Nuffield-Chelsea Curriculum Trust
-
Book of Data, Revised Nuffield Advanced Science, Third Impression. R. D. Harrison, H. Ellis, and H. D. B. Jenkins, Eds. The Nuffield-Chelsea Curriculum Trust, 1985.
-
(1985)
Book of Data, Revised Nuffield Advanced Science, Third Impression
-
-
Harrison, R.D.1
Ellis, H.2
Jenkins, H.D.B.3
-
27
-
-
0027812959
-
High-Q microwave acoustic resonators and filters
-
K. M. Lakin, G. R. Kline, and K. T. McCarron, "High-Q microwave acoustic resonators and filters," IEEE Trans. Microwave Theory Tech., vol. 41, no. 12, pp. 2139-2146, 1993.
-
(1993)
IEEE Trans. Microwave Theory Tech.
, vol.41
, Issue.12
, pp. 2139-2146
-
-
Lakin, K.M.1
Kline, G.R.2
McCarron, K.T.3
-
28
-
-
0028546341
-
Advances in high-Q piezoelectric resonator materials and devices
-
A. Ballato and J. G. Gualtieri, "Advances in high-Q piezoelectric resonator materials and devices," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 41, no. 6, pp. 834-844, 1994.
-
(1994)
IEEE Trans. Ultrason., Ferroelect., Freq. Contr.
, vol.41
, Issue.6
, pp. 834-844
-
-
Ballato, A.1
Gualtieri, J.G.2
-
29
-
-
33645135969
-
Expression for effect of porosity on elastic modulus of polycrystalline refractory materials, particularly aluminium oxide
-
R. M. Spriggs, "Expression for effect of porosity on elastic modulus of polycrystalline refractory materials, particularly aluminium oxide," J. Amer. Ceram. Soc., vol. 44, no. 12, pp. 628-629, 1961.
-
(1961)
J. Amer. Ceram. Soc.
, vol.44
, Issue.12
, pp. 628-629
-
-
Spriggs, R.M.1
-
30
-
-
79955984684
-
3 with engineered domain structures
-
3 with engineered domain structures," Appl. Phys. Lett., vol. 80, no. 14, pp. 2466-2468, 2002.
-
(2002)
Appl. Phys. Lett.
, vol.80
, Issue.14
, pp. 2466-2468
-
-
Jiang, W.1
Cao, W.2
Han, P.3
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