Fabrication and modeling of high-frequency PZT composite thick film membrane resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 51, Issue 10, 2004, Pages 1255-1261

  Duval, Fabrice F C ^a   Dorey, Robert A ^a   Wright, Robert W ^a   Huang, Zhaorong ^a   Whatmore, Roger W ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATTENUATION; COMPOSITE MATERIALS; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; NONDESTRUCTIVE EXAMINATION; RESONATORS; SILICA; STIFFNESS; THIN FILMS; ULTRASONIC TRANSDUCERS;

ELECTROMECHANICAL COUPLING COEFFICIENT; FILM BULK ACOUSTIC WAVE RESONATOR (FBAR); MICROMACHINED ULTRASONIC TRANSDUCERS (MUT); PIEZOELECTRIC THIN FILMS;

PIEZOELECTRIC TRANSDUCERS;

EID: 8344260658     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2004.1350953     Document Type: Article

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