|
Volumn 39, Issue 2 I, 2003, Pages 826-831
|
An active head slider using a piezoelectric cantilever for in situ flying-height control
d
HITACHI LTD
(Japan)
|
Author keywords
Hard disks; Microactuators; Microelecto mechanical devices; Piezoelectric films
|
Indexed keywords
AERODYNAMICS;
ELECTRIC POTENTIAL;
HARD DISK STORAGE;
MICROACTUATORS;
MICROMACHINING;
ACTIVE HEAD SLIDER;
FLYING-HEIGHT CONTROL;
PIEZOELECTRIC CANTILEVER;
PIEZOELECTRIC DEVICES;
|
EID: 0037361414
PISSN: 00189464
EISSN: None
Source Type: Journal
DOI: 10.1109/TMAG.2003.808934 Document Type: Article |
Times cited : (25)
|
References (8)
|