Direct bonding of piezoelectric materials onto Si

IEEE International Symposium on Applications of Ferroelectrics

Volumn 2, Issue , 1996, Pages 719-722

  Eda, Kazuo ^a   Tomita, Yoshihiro ^a   Sugimoto, Masato ^a   Ogura, Tetsuyoshi ^a   Nanba, Akihiko ^a   Taguchi, Yutaka ^a   Kawasaki, Osamu ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; INTERFACES (MATERIALS); MICROSTRUCTURE; SILICON WAFERS; SURFACE STRUCTURE;

DIRECT WAFER BONDING;

PIEZOELECTRIC MATERIALS;

EID: 0030373251     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)