Analysis and prevention of convex corner undercutting in bulk micromachined silicon microstructures

Microelectronics Journal

Volumn 37, Issue 8, 2006, Pages 765-769

  Biswas, K ^a   Das, S ^a   Kal, S ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY   (India)

Author keywords

Anisotropic etching; Beveling; Compensation patterns; Corner undercutting; MEMS

Indexed keywords

ANISOTROPY; CANTILEVER BEAMS; CRYSTALLINE MATERIALS; DEFORMATION; ETCHING; MICROMACHINING; SILICON WAFERS;

ANISOTROPIC ETCHING; BEVELING; COMPENSATION PATTERNS; CORNER UNDERCUTTING; MEMS;

SILICON;

EID: 33746806306     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2005.10.010     Document Type: Article

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