Bulk-micromachined structures inside anisotropically etched cavities

Smart Materials and Structures

Volumn 13, Issue 6, 2004, Pages 1424-1429

  Pal, Prem ^a   Chandra, Sudhir ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CANTILEVER BEAMS; COMPOSITE MICROMECHANICS; ELECTRODEPOSITION; MICROMACHINING; MICROSTRUCTURE; PHOTORESISTS; SILICA;

BULK-MICROMACHINED STRUCTURES; MICRO-RELAYS; MICRO-SWITCHES; MICROBRIDGES;

ETCHING;

EID: 10444229612     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/13/6/013     Document Type: Article

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