On the miller-indices determination of Si{100} convex corner undercut planes

Journal of Micromechanics and Microengineering

Volumn 15, Issue 4, 2005, Pages 833-842

  Chien, W T Chang ^a   Chang, C O ^b   Lo, Y C ^c   Li, Z W ^b   Chou, C S ^b  

^a FOOYIN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c NATIONAL SYNCHROTRON RADIATION RESEARCH CENTER   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CHEMICAL ANALYSIS; ETCHING; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SCANNING ELECTRON MICROSCOPY;

ANISOTROPIC ETCHING; CONVEX CORNER; MILLER-INDICES; WAVE THEORY;

SILICON;

EID: 17444372064     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/4/022     Document Type: Article

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