System modeling of microaccelerometer using piezoelectric thin films

Sensors and Actuators, A: Physical

Volumn 88, Issue 2, 2001, Pages 178-186

  Yu, Jyh Cheng ^a   Lan, Chin Bing ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMIC RESPONSE; MICROSTRUCTURE; NATURAL FREQUENCIES; OPTIMIZATION; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SENSITIVITY ANALYSIS; SENSORS; THIN FILMS;

PIEZOELECTRIC THIN FILMS;

ACCELEROMETERS;

EID: 0035251394     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00502-1     Document Type: Article

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