SCOPUS 정보 검색 플랫폼

Volumn 7, Issue 3, 1997, Pages 141-144

New structure for corner compensation in anisotropic KOH etching

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MASKS; POTASSIUM COMPOUNDS;

COMPENSATION MASK DESIGN;

MICROELECTROMECHANICAL DEVICES;

EID: 0031221973 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/7/3/016 Document Type: Article

Times cited : (33)

References (5)

1
- 0018030427
- Anisotropic etching of silicon
- Bean K E 1978 Anisotropic etching of silicon IEEE Trans. Electron Dev. 25 (10) 1185-93
- (1978) IEEE Trans. Electron Dev. , vol.25 , Issue.10 , pp. 1185-1193
- Bean, K.E.¹

2
- 0000818529
- Compensating corner under-cutting of (100) silicon in KOH
- Offereins H L, Sandmaier H, Marusczyk K, Kühl K and Plettner A 1992 Compensating corner under-cutting of (100) silicon in KOH Sens. Mater. 3 127-44
- (1992) Sens. Mater. , vol.3 , pp. 127-144
- Offereins, H.L.¹ Sandmaier, H.² Marusczyk, K.³ Kühl, K.⁴ Plettner, A.⁵

4
- 0030107581
- Vibration modes of a resonant silicon tube density sensor
- Enoksson P, Stemme G and Stemme E 1996 Vibration modes of a resonant silicon tube density sensor J. Microelectromech. Syst. 5 39-44
- (1996) J. Microelectromech. Syst. , vol.5 , pp. 39-44
- Enoksson, P.¹ Stemme, G.² Stemme, E.³

5
- 0029272646
- Fluid density sensor based on resonance vibration
- Enoksson P, Stemme G and Stemme E 1995 Fluid density sensor based on resonance vibration Sens. Actuators A 47 327-31
- (1995) Sens. Actuators A , vol.47 , pp. 327-331
- Enoksson, P.¹ Stemme, G.² Stemme, E.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.