The design and operation of a MEMS differential scanning nanocalorimeter for high-speed heat capacity measurements of ultrathin films

Journal of Microelectromechanical Systems

Volumn 12, Issue 3, 2003, Pages 355-364

  Olson, Eric A ^a   Efremov, Mikhail Yu ^a   Zhang, Ming ^a   Zhang, Zishu ^a   Allen, Leslie H ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

Calorimetry; Membranes; Microelectromechanical systems; Microsensors; Nanoparticles; Plastic films; Thin films

Indexed keywords

DIFFERENTIAL SCANNING CALORIMETRY; METALLIZING; SPECIFIC HEAT; ULTRATHIN FILMS;

NANOCALORIMETERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0038547118     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.811755     Document Type: Article

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