Recessed microstructures with perfect convex corners for accelerometers

Sensor Letters

Volumn 2, Issue 3-4, 2004, Pages 226-231

  Pal, Prem ^a   Chandra, Sudhir ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

Accelerometer; Convex corners; Corner compensation; LOCOS; MEMS; Recessed; Seismic mass; Silicon bulk micromachining; Wet anisotropic etching

Indexed keywords

ANISOTROPY; CMOS INTEGRATED CIRCUITS; ETCHING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SILICON WAFERS; THERMAL DIFFUSION;

CONVEX CORNERS; CORNER COMPENSATION; MICROELECTROMECHANICAL SYSTEMS; RECESSED MICROSTRUCTURES; SEISMIC MASS; SILICON BULK MICROMACHINING; WET ANISOTROPIC ETCHING;

ACCELEROMETERS;

EID: 13844277021     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2004.050     Document Type: Article

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