Microfabricated gas sensor systems with sensitive nanocrystalline metal-oxide films

Journal of Nanoparticle Research

Volumn 8, Issue 6, 2006, Pages 823-839

  Graf, M ^a   Gurlo, A ^b   Barsan N ^b   Weimar, U ^b   Hierlemann, A ^a  

^a ETH ZURICH   (Switzerland)

^b UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

CMOS; Deposition; Gas sensor systems; Metal oxides; Microhotplates

Indexed keywords

CMOS INTEGRATED CIRCUITS; DEPOSITION; METALLIC FILMS; MICROSENSORS; NANOSTRUCTURED MATERIALS; SOL-GELS;

GAS SENSOR SYSTEMS; METAL OXIDES; MICROHOTPLATES; MICROTRANSDUCERS;

CHEMICAL SENSORS;

EID: 33751502202     PISSN: 13880764     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11051-005-9036-7     Document Type: Article

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