Thermolithographic patterning of sol-gel metal oxides on micro hot plate sensing arrays using organosilanes

Analytical Chemistry

Volumn 75, Issue 17, 2003, Pages 4360-4367

  Savage, Nancy Ortins ^a   Roberson, Sonya ^a   Gillen, Greg ^a   Tarlov, Michael J ^a   Semancik, Steve ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SOL-GEL METAL OXIDES;

MICROMACHINING; SILANES; SOL-GELS; THIN FILMS; TIN COMPOUNDS;

IRON OXIDES;

(TRIDECAFLUORO 1,1,2,2 TETRAHYDROOCTYL)TRICHLOROSILANE; FERRIC OXIDE; HEXYLTRICHLOROSILANE; HYDROGEN; LIMESTONE; ORGANOSILANE DERIVATIVE; SILANE DERIVATIVE; TIN DERIVATIVE; UNCLASSIFIED DRUG;

ARTICLE; HYDROGEN BOND; HYDROPHOBICITY; MASS SPECTROMETRY; MEASUREMENT; PHASE TRANSITION; POLYMERIZATION; SURFACE PROPERTY; THERMAL ANALYSIS;

EID: 0041336774     PISSN: 00032700     EISSN: None     Source Type: Journal    
DOI: 10.1021/ac0301797     Document Type: Article

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