Metal oxide-based monolithic complementary metal oxide semiconductor gas sensor microsystem

Analytical Chemistry

Volumn 76, Issue 15, 2004, Pages 4437-4445

  Graf, Markus ^a   Barrettino, Diego ^a   Taschini, Stefano ^a   Hagleitner, Christoph ^b   Hierlemann, Andreas ^a   Baltes, Henry ^a  

^a ETH ZURICH   (Switzerland)

^b IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION (PROCESS); METAL ANALYSIS; NANOSTRUCTURED MATERIALS; OXIDATION; PLATES (STRUCTURAL COMPONENTS); THERMAL EFFECTS; THICK FILMS;

METAL OXIDE; MICROELECTRONIC PACKAGING SYSTEMS; MICROSYSTEMS; SENSOR CHIPS;

CHEMICAL SENSORS;

CARBON MONOXIDE; METAL OXIDE; TIN;

ARTICLE; ENVIRONMENTAL MONITORING; HEATING; MEASUREMENT; NANOTECHNOLOGY; SEMICONDUCTOR; SENSOR; THERMOREGULATION;

EID: 3543040017     PISSN: 00032700     EISSN: None     Source Type: Journal    
DOI: 10.1021/ac035432h     Document Type: Article

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