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Sensors and Actuators, B: Chemical

Volumn 76, Issue 1-3, 2001, Pages 380-387

Ultralow power carbon monoxide microsensor by micromachining techniques

(3) Tsai, Ping Ping a Chen, I Cherng a Ho, Chao Jen a

a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (Taiwan)

Author keywords

Carbon monoxide sensor; Low power; Micromachining techniques; Microsensor; Oscillation response; Self heating

Indexed keywords

CARBON MONOXIDE; CHEMICAL SENSORS; MICROMACHINING;

OSCILLATION RESPONSE; SELF HEATING;

MICROSENSORS;

EID: 0035368319 PISSN: 09254005 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-4005(01)00641-4 Document Type: Conference Paper

Times cited : (35)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.