Development of tin oxide material by screen-printing technology for micro-machined gas sensors

Sensors and Actuators, B: Chemical

Volumn 93, Issue 1-3, 2003, Pages 531-537

  Riviere, Béatrice ^a   Viricelle, Jean Paul ^a   Pijolat, Christophe ^a  

^a ECOLE DES MINES DE SAINT ETIENNE   (France)

Author keywords

Adhesion; Conductivity; Gas sensor; Gel; Screen printing; Tin oxide

Indexed keywords

ADDITION REACTIONS; ADHESION; ANNEALING; CERAMIC MATERIALS; DEPOSITION; MICROELECTRONICS; MICROMACHINING; RHEOLOGY; SCREEN PRINTING; SILICON WAFERS; SUBSTRATES; TIN COMPOUNDS;

SENSING ELEMENTS;

CHEMICAL SENSORS;

EID: 0038351927     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00173-4     Document Type: Conference Paper

References (16)

1. Williams D.E. Semiconducting oxides as gas-sensitive resistors. Sens. Actuators B. 57:1999;1-16.
2. 2 sensors: current status and future prospects. Sens. Actuators B. 26-27:1995;1-12.
3. Dutraive M.S., Lalauze R., Pijolat C. Sintering, catalytic effects and defect chemistry in polycrystalline tin oxide. Sens. Actuators B. 26-27:1995;38-44.
4. Watson J. The tin oxide gas sensors and its applications. Sens. Actuators B. 5:1984;29-42.
5. Simon I., Bârsan N., Bauer M., Weimar U. Micromachined metal oxide gas sensors: opportunities to improve sensor performance. Sens. Actuators B. 73:2002;1-26.
6. 2 films prepared by CVD, in: P. Vincenzini (Ed.), Advances in Inorganic Films and Coatings, Techna, 1995, pp. 497-504.
7. Prudenziati M. Thick film technology. Sens. Actuators A. 25-27:1991;227-234.
8. Vincenzi D., Butturi M.A., Guidi V., Carotta M.C., Martinelli G., Guarnieri V., Brida S., Margesin B., Giacomozzi F., Zen M., Pignatel G.U., Vasiliev A.A., Pisliakov A.V. Development of a low-power thick-film gas sensor deposited by screen-printing onto a micromachined hotplate. Sens. Actuators B. 77:2001;95-99.
9. Vincenzi D., Butturi M.A., Guidi V., Carotta M.C., Martinelli G., Guarnieri V., Brida S., Margesin B., Giacomozzi F., Zen M., Giusti D., Soncini G., Vasiliev A.A., Pisliakov A.V. Gas sensing device implemented on a micromachined membrane: a combination of thick-film and very large scale integrated technologies. J. Vac. Sci. Technol. B. 18(5):2001;2441-2445.
10. Montanaro L., Tersalvi A. Set up of a screen-printing procedure for the production of a β-alumina-based gas sensor. J. Electroceram. 5(3):2000;253-259.
11. Billi E., Viricelle J.-P., Montanaro L., Pijolat C. Development of a protected gas sensor for automotive application. IEEE Sensors J. 2(4):2002;342-348.
12. E. Billi, L. Montanaro, A. Negro, C. Pijolat, J.P. Viricelle, R. Lalauze, French Patent 0F.991 CAS40 JPR.BL.MJR (2000).
13. Wilson A., Wright J.D., Murphy J.J. Sol-gel materials for gas sensing applications. Sens. Actuators B. 18-19:1994;506-510.
14. Cobianu C., Savaniu C., Buiu O., Dascalu D., Zaharescu M., Parlog C., van den Berg A., Pecz B. Tin dioxide sol-gel derived thin films deposited on porous silicon. Sens. Actuators B. 43:1997;114-120.
15. E. Guyon, La physique de la matière hétérogène, Pour la Science (Octobre 1982), pp. 14-25.
16. Malliaris A., Turner D.T. Influence of particle size on the electrical resistivity of compacted mixtures of polymeric and metallic powders. J. Appl. Phys. 42(2):1971;614-618.