Selected-area deposition of multiple active films for conductometric microsensor arrays

Sensors and Actuators, B: Chemical

Volumn 34, Issue 1-3, 1996, Pages 209-212

  Semancik, Steve ^a   Cavicchi, Richard E ^a   Kreider, Kenneth G ^a   Suehle, John S ^a   Chaparala, Prasad ^a,b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

Arrays; Chemical vapor deposition; Conductance; Micromachining; Microsensors; Tin oxide

Indexed keywords

EID: 0042545952     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(96)01823-0     Document Type: Article

References (6)

1. See, for example, M.J. Madou and S.R. Morrison, Chemical Sensing with Solid State Devices, Academic Press, San Diego, 1989, pp. 419-436, 479-516.
2. R.E. Cavicchi, J.S. Suehle, P. Chaparala, K.G. Kreider, M. Gaitan and S. Semancik, Micro-hotplate gas sensor, Proc. 1994 Solid State Sensor and Actuator Workshop, Hilton Head, SC, USA, 1994, pp. 53-56.
3. J.S. Suehle, R.E. Cavicchi, M. Gaitan and S. Semancik, Tin oxide gas sensor fabricated using CMOS micro-hotplates and in situ processing, IEEE Electron Device Lett., 14 (1993) 118-120.
4. 2 (110), Proc. 3rd Int. Meet. Chemical Sensors, Cleveland, OH, USA, 1990, pp. 23-26.
5. G.E. Poirier, R.E. Cavicchi and S. Semancik, Particle growth of palladium on epitaxial tin oxide films, J. Vac. Sci. Technol., AI2 (1994) 2149-2152 and references therein.
6. 2 films on micromachined hotplates, App. Phys. Lett., 66 (1995) 812-814.