Gas sensing through thick film technology

Sensors and Actuators, B: Chemical

Volumn 84, Issue 1, 2002, Pages 72-77

  Guidi, V ^a,c   Butturi, M A ^a   Carotta, M C ^a   Cavicchi, B ^a   Ferroni, M ^a   Malagu C ^a   Martinelli, G ^a   Vincenzi, D ^a   Sacerdoti, M ^a   Zen, M ^b  

^a UNIVERSITY OF FERRARA   (Italy)

^b ITC IRST   (Italy)

^c Sezione di Ferrara   (Italy)

Author keywords

Micromachined hotplates; Nanostructured TiO2; Thick film gas sensors

Indexed keywords

DEPOSITION; LASER APPLICATIONS; MICROMACHINING; NANOSTRUCTURED MATERIALS; POWDERS; PYROLYSIS; SCREEN PRINTING; SOL-GELS; THICK FILMS; TIN COMPOUNDS;

THICK-FILM GAS SENSORS;

CHEMICAL SENSORS;

EID: 0036680692     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)01077-2     Document Type: Conference Paper

References (15)